Nano-Post Image Sensor Layout for Color Separation and Low Crosstalk

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Solution Overview

Problem

Current image sensors face challenges in maximizing light utilization efficiency and minimizing cross-talk between pixels, which affects their sensitivity and auto-focus capabilities.

Innovation Solution

The image sensor incorporates a color separating lens array with nano-posts spaced apart on a spacer layer, along with a deep device isolation pattern that extends into each pixel region, allowing for efficient separation of incident light wavelengths and reducing interference between photoelectric conversion regions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If color filters are used to sense colors of incident light, then color detection capability is improved, but light utilization efficiency deteriorates due to absorption of light of other colors

Engineering Contradiction:
Improvecolor detection capabilityVSAvoidlight utilization efficiency
Core Design Contradiction:
Measurement precisionVSLoss of energy

Solution Approach 1:

The incident light is segmented by wavelength using a color separating lens array that directs different wavelengths to different pixel regions. This replaces the conventional color filter approach where each filter absorbs non-matching wavelengths, with a system that physically separates and directs wavelengths, thereby improving light utilization efficiency while maintaining color detection capability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A color separating lens array is introduced as an intermediary optical element between the incident light and the pixel regions. This lens array uses diffractive or refractive properties to separate colors and adjust directionality according to wavelength, enabling efficient light routing without the energy loss associated with color filter absorption.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If pixels are arranged closely to increase resolution, then image quality is improved, but cross-talk between pixels increases reducing sensitivity

Engineering Contradiction:
Improveimage qualityVSAvoidpixel sensitivity
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The harmful optical interference between adjacent pixels is extracted and removed by introducing a deep device isolation pattern. This isolation structure extends into the substrate between pixel regions, effectively blocking stray light and preventing cross-talk, thereby maintaining pixel sensitivity even when pixels are closely arranged for high resolution.

Inventive Principle:
Principle #2Taking out (Extraction)

3Ease of manufacture

If conventional device isolation is used between pixels, then manufacturing simplicity is maintained, but cross-talk between pixels increases affecting sensitivity

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidpixel sensitivity
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

A deep device isolation pattern is formed preliminarily between pixel regions before final pixel fabrication. This isolation structure extends deep into the substrate and prevents cross-talk between pixels, ensuring high pixel sensitivity while maintaining compatibility with conventional manufacturing processes.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances light efficiency, improves pixel sensitivity, and enables auto-focus functionality by minimizing cross-talk between pixels, thereby optimizing image sensing performance.

Implementation Method 1

The color separating element may separate colors of incident light by using diffractive or refractive properties of lights having different wavelengths

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 2

The color separating element may separate colors of incident light by using diffractive or refractive properties of lights having different wavelengths

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 3

The photodiode may convert incident light into an electrical signal

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS20240170522A1Image sensors
Publication Date: 2024.05.23 SAMSUNG ELECTRONICS CO LTD
  • US20240170522A1 patent drawing
  • US20240170522A1 patent drawing
  • US20240170522A1 patent drawing

AI summary

An image sensor includes a substrate having a first surface and a second surface which are opposite to each other, the substrate comprising a plurality of pixel regions arranged in a first direction and a second direction which are parallel to the first surface and intersect each other, a deep device isolation pattern extending into the substrate and between the plurality of pixel regions, and a color separating lens array on the second surface of the substrate. The color separating lens array includes a spacer layer on the second surface of the substrate, and a plurality of nano-posts horizontally spaced apart from each other on the spacer layer.