Nano-array Fabrication via AAO Template Embossing

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Solution Overview

Problem

Current methods for fabricating nano-structures with diameters below 100 nm are complex, expensive, and prone to deformation during the removal of templates, especially when using anodic alumina oxidation, which affects the shape and functionality of the nano-structures.

Innovation Solution

A controllable embossing process using an anodic alumina oxidation template to form nano-protrusions on a thermoplastic polymer substrate, where the template is demolded without etching, avoiding environmental issues and deformation, and allowing for further coating to enhance properties like scratch resistance and hydrophobicity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If anodic alumina oxidation template is used to fabricate nano-structures, then nano-structures with regular geometry can be obtained, but the template must be removed by etching which causes deformation and loss of shape

Engineering Contradiction:
Improvenano-structure shape precisionVSAvoiddeformation during template removal
Core Design Contradiction:
Manufacturing precisionVSObject-generated harmful factors

Solution Approach 1:

The invention extracts and removes the harmful etching step from the fabrication process. Instead of using chemical etching to remove the template, the method directly forms nano-protrusions on the substrate surface through embossing, eliminating the need for template removal and avoiding the associated deformation and shape loss.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The invention inverts the conventional approach: instead of forming nano-holes through template removal, it directly forms nano-protrusions through embossing. This reversal eliminates the template removal step entirely and directly achieves the desired nano-structure geometry without deformation.

Inventive Principle:
Principle #13The other way round (Inversion)

2Manufacturing precision

If lithography is used to fabricate nano-structures with diameter below 100 nm, then precise geometry can be achieved, but the process becomes difficult and expensive

Engineering Contradiction:
Improvenano-structure geometry precisionVSAvoidfabrication process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The invention uses a simple embossing template that copies the desired nano-structure geometry directly onto the substrate. This copying approach replaces complex lithography processes with a straightforward embossing operation, achieving precise geometry at lower cost and complexity.

Inventive Principle:
Principle #26Copying

Solution Approach 2:

The invention replaces complex chemical lithography processes with a simple mechanical embossing process. The embossing method uses direct mechanical contact to transfer the nano-structure pattern, eliminating the need for complex photoresist coating, exposure, and development steps.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Adaptability or versatility

If twice surface treatments are applied to polymer substrate, then hydrophobic or anti-oil surface can be obtained, but the process becomes complicated and expensive

Engineering Contradiction:
Improvesurface property (hydrophobicity)VSAvoidsurface treatment process complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The invention performs the surface modification action during the embossing process itself. The nano-protrusions are formed directly on the substrate surface during manufacturing, preliminarily establishing the hydrophobic properties without requiring subsequent separate surface treatment steps.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The invention merges the nano-structure formation and surface property modification into a single embossing operation. The same process that creates the nano-protrusions also imparts the hydrophobic or anti-oil properties, eliminating the need for separate surface treatment steps.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The process reduces costs, maintains nano-structure integrity, and enhances the substrate's hydrophobicity, adhesion, and reflectivity, achieving superhydrophobicity and improved adhesion with coatings while maintaining the nano-structure's functionality.

Implementation Method 1

Anodic alumina oxidation (AAO) as a template has been published in Science (2002) by M. Steinhard et al.

Methodology Applied
Scientific EffectAnodic alumina oxidation: Anodising

Implementation Method 2

A controllable embossing process using an anodic alumina oxidation template to form nano-protrusions on a thermoplastic polymer substrate

Methodology Applied
Scientific EffectEmbossing:

Implementation Method 3

Nano-structures of insect's ommateum having a diameter of less than 250 nm exhibit super-low reflectivity in wide wavelength range of light. Moth Eye Principle has been proposed in Nature (1973) by Clapham and Hutley.

Methodology Applied
Scientific EffectMoth Eye Principle:

Implementation Method 4

In Planta, Lotus effect has been observed by W. barthlott et al. There is a plurality of nano-protrusions having a diameter of less than 50 nm on the surface of lotus to obtain a self-cleaning surface due to small contact area of the nano-protrusions.

Methodology Applied
Scientific EffectLotus effect: Lotus Leaf Effect

Data Source

PatentUS8198128B2Nano-array and fabrication method thereof
Publication Date: 2012.06.12 IND TECH RES INST
  • US8198128B2 patent drawing
  • US8198128B2 patent drawing
  • US8198128B2 patent drawing

AI summary

The invention provides a method for fabricating a nano-array comprising the following steps. A template with a plurality of nano-holes is provided. A polymer is embossed by the template to integrally form a plurality of nano-protrusions thereon, and demolding to reveal the nano-protrusions. The nano-protrusion has a concave or convex top surface.