Nanoimprint Template Shape Correction via Residual Film Thickness
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Solution Overview
Problem
The optical nanoimprint method faces challenges in achieving accurate alignment of transcription patterns due to varying fluidity of photo-curable organic materials, which is difficult to correct without optimal shape adjustment of the template.
Innovation Solution
The method involves coating a photo-curable organic material on a substrate, applying a force to a template with a concave-convex pattern, curing the material with light, and releasing the template, while using a pressurizing mechanism to correct the template shape and measure residual film thickness to determine the appropriate force for alignment, creating a database to correlate residual film thickness with the necessary force for precise pattern formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the template is pressed against the photo-curable organic material layer for pattern transcription, then the patterns are formed on the substrate, but misalignment between the template and substrate occurs due to varying fluidity of the organic material
Solution Approach 1:
The patent applies preliminary shape correction to the template by pressurizing it from left and right before the imprinting process. This preliminary action adjusts the template shape in advance to compensate for potential misalignment, ensuring accurate alignment between the template and substrate when the template is pressed against the photo-curable organic material layer.
Solution Approach 2:
The patent changes the physical parameters of the template by applying pressure to correct its shape. By pressurizing the template from left and right, the template's geometric parameters are adjusted to achieve optimal alignment, compensating for the varying fluidity of the photo-curable organic material during the imprinting process.
2Manufacturing precision
If the template shape is corrected by pressurizing from left and right, then the alignment accuracy is improved, but the complexity of the processing increases
Solution Approach 1:
The patent segments the template correction process into independent pressurization actions from left and right sides. This segmentation allows for simple, localized adjustments to the template shape without requiring a complex integrated correction mechanism, thereby improving alignment accuracy while maintaining processing simplicity.
3Stability of the object's composition
If the same photo-curable organic material is used for multiple imprinting processes, then material consistency is maintained, but fluidity varies depending on processing conditions affecting alignment
Solution Approach 1:
The patent applies preliminary anti-action by pre-correcting the template shape to counteract the adverse effect of fluidity variation. By adjusting the template shape in advance through pressurization, the system compensates for the varying fluidity of the photo-curable organic material under different processing conditions, maintaining alignment accuracy despite material consistency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach improves the alignment accuracy of transcription patterns by adjusting the force applied to the template based on residual film thickness, reducing misalignment with previously formed base patterns and enhancing the precision of pattern formation.
Implementation Method 1
curing the photo-curable organic material by irradiating light onto the photo-curable organic material
Data Source
AI summary
According to one embodiment, an imprint method comprises coating a photo-curable organic material on a film to be processed, bringing a concave-convex pattern of a template into contact with the photo-curable organic material, applying a force to the template in such a state that the template is brought into contact with the photo-curable organic material, curing the photo-curable organic material by irradiating light onto the photo-curable organic material, in such a state that the template is brought into contact with the photo-curable organic material, and releasing the template from the photo-curable organic material after the light irradiation. The force applied to the template corresponds to a gap between a surface of the film to be processed and the template.