Nanoimprint Template Separation Pressure Control
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Solution Overview
Problem
The existing nanoimprinting pattern forming methods often result in defects due to the template pulling out part of the resist during separation, particularly due to varying density distributions of the pattern, which affects the proper formation of patterns.
Innovation Solution
The method involves contacting a template with an imprint material on a substrate, curing it, and then separating the template while applying pressure to the back surface, using a load measuring section and gas control to maintain a constant load or separation speed, thereby preventing defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the template is separated from the resist without applying pressure to the back surface, then the separation process is simple, but the template pulls out part of the resist causing defects
Solution Approach 1:
The invention changes the physical parameter of pressure applied to the back surface of the template during separation. By controlling pressure to be 0.1-1.0 MPa, the template maintains stable contact with the resist while preventing excessive adhesion forces that would cause resist pull-out, thus improving pattern formation quality without complexifying the separation mechanism
Solution Approach 2:
The invention performs preliminary action by pre-applied pressure to the back surface of the template before actual separation occurs. This preliminary pressure application ensures that the template is ready to maintain optimal contact with the resist throughout the separation process, preventing resist pull-out defects from the outset
2Manufacturing precision
If pressure is applied to the back surface of the template during separation, then resist pull-out is prevented, but the separation process becomes more complex
Solution Approach 1:
The invention optimizes the pressure parameter to a specific range (0.1-1.0 MPa) that achieves the dual goal of preventing resist pull-out while maintaining operational simplicity. This controlled pressure application allows the template to separate cleanly from the resist without requiring complex mechanical systems
3Productivity
If the template separates rapidly from the resist, then the process time is reduced, but adhesion variations cause defects
Solution Approach 1:
The invention changes the pressure parameter during separation to control the separation speed and maintain consistency. By applying pressure in the range of 0.1-1.0 MPa, the separation process proceeds at an optimal speed that prevents resist pull-out while maintaining pattern consistency, balancing productivity with reliability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach ensures consistent pattern formation by controlling the load or separation speed during template separation, reducing the likelihood of defects caused by rapid changes in adhesion between the template and resist.
Implementation Method 1
applying pressure to the back surface of the template
Implementation Method 2
the resist is irradiated with light and thus cured
Data Source
AI summary
An imprint pattern forming method includes contacting a template with a pattern in a front surface with an imprint material formed in a substrate to fill the imprint material into the pattern, curing the imprint material filled in the pattern to form an imprint material pattern, and after forming the imprint material pattern, separating the template from the imprint material pattern while applying pressure to the back surface of the template.