Variable Filling Time for Nanoimprint Throughput
Solution Overview
Problem
The nanoimprint lithography process is limited by the filling time of polymerizable material into the template pattern features, which, if reduced excessively, increases the defect rate, necessitating a method to minimize filling time while maintaining quality.
Innovation Solution
The method involves determining the template filling time for each location on the substrate based on real-time alignment data and defect density, allowing the filling time to vary, with adjustments made to prevent defects and optimize yield and throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the filling time is reduced to improve throughput, then the cycle time decreases and productivity increases, but the defect rate increases due to insufficient filling of the template pattern features
Solution Approach 1:
The patent applies local quality by determining different filling times for different locations on the substrate. The system divides the substrate into multiple locations and assigns a specific filling time to each location based on its characteristics, allowing the filling process to be optimized locally rather than using a uniform filling time across the entire substrate. This resolves the contradiction by enabling shorter filling times in locations where they are sufficient while maintaining longer filling times in locations that require them to avoid defects.
Solution Approach 2:
The patent implements dynamics by making the filling time variable rather than fixed. The system dynamically adjusts the filling time for each location based on real-time alignment data and defect density measurements. This dynamic approach allows the filling time to adapt to the specific conditions of each location, improving throughput where possible while maintaining quality where needed.
2Loss of time
If the filling time is reduced excessively, then the cycle time decreases, but the template pattern features are not sufficiently filled leading to increased defects
Solution Approach 1:
The system determines the minimum filling time required for each specific location on the substrate based on the local template pattern features and alignment characteristics. This local optimization ensures that each location receives the precise filling time needed to achieve complete filling without excessive wait time, thereby minimizing overall cycle time while maintaining manufacturing precision.
Solution Approach 2:
The system performs preliminary determination of filling times for all locations before the actual imprinting process begins. By pre-calculating the optimal filling time for each location based on alignment data and defect density, the system eliminates unnecessary waiting time during the imprinting process while ensuring that each location receives sufficient filling time to avoid defects.
3Device complexity
If a uniform filling time is used across all locations, then the process is simpler to control, but locations with different alignment convergence characteristics cannot be optimized
Solution Approach 1:
The patent changes the parameter of filling time from a single uniform value to multiple location-specific values. The system determines different filling times for different locations based on alignment convergence characteristics and defect density measurements. This parameter change enables optimization of throughput for each location while the automated determination process keeps the control complexity manageable.
Solution Approach 2:
The system uses feedback from real-time alignment data and defect density measurements to determine the optimal filling time for each location. This feedback mechanism allows the system to automatically adjust filling times based on actual process conditions, optimizing throughput without requiring complex manual control for each location.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the overall defect density and increases yield by ensuring the filling time is optimized for each location, balancing alignment convergence and filling time to enhance the nanoimprint process efficiency.
Implementation Method 1
bringing a nanoimprint template into contact with these droplets such that the droplets spread and fill the patterning surface of the template
Implementation Method 2
solidifying the polymerizable material, and (4) separating the template from the substrate
Data Source
AI summary
An imprinting method and system in which, a template is imprinted onto formable material at a plurality of locations on a substrate. A template filling time varies among the plurality of locations. The template filling time for each of the locations is determined prior to applying the formable material to the substrate. The template is aligned to the substrate each time the template is imprinted onto the formable material during an alignment convergence period that is determined to have completed when real time alignment data indicates that alignment of the template and the substrate is within specified limits. The alignment convergence period and the template filing period overlap. Curing the formable material in the template at each of the plurality of locations after both the alignment convergence period has completed and the template filing period has expired.