Nanoindentation Measuring Head with Integrated Topographic Tip

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Solution Overview

Problem

Existing nano-indentation measuring instruments face precision limitations due to large separation between indenter and reference axes, leading to measurement errors from flexure, vibrations, and temperature effects, and require separate topographical scanners for accurate targeting, which reduces precision and increases displacement.

Innovation Solution

A nano-indentation measuring head with a relative position sensing system using a topographic tip integrated with the indenter, allowing precise positioning and contact detection, eliminating the need for a separate scanning system and reducing displacement, and utilizing piezoelectric actuators for accurate force control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a separate topographical scanner is used to identify areas of interest for indentation, then the scanner can locate target positions, but the displacement from scanner to indenter reduces precision and increases system complexity

Engineering Contradiction:

Improvetargeting precisionVSAvoidsystem complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent combines the topographical scanning function and indentation function into a single integrated measuring head. The same probe tip is used for both scanning the sample surface to locate areas of interest and for performing the indentation measurement, eliminating the need for a separate scanner and reducing the displacement between scanning and measurement positions.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The measuring head is designed with multi-functionality, where the indenter probe serves dual purposes: it acts as both a scanning probe for topographical mapping and as an indentation tool for mechanical property measurement. This universal design reduces the number of components needed and improves positioning accuracy.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Measurement precision

If a separate topographical scanner is used, then target areas can be identified, but the displacement from scanner to indenter limits precision

Engineering Contradiction:

Improvepositioning accuracyVSAvoiddisplacement distance

Core Design Contradiction:

Measurement precisionVSLength of moving object

Solution Approach 1:

The patent merges the scanning and indentation functions into a single integrated measuring head, eliminating the physical displacement between a separate scanner and indenter. The same probe tip performs both topographical scanning to identify target areas and subsequent indentation measurement at the exact same location, maximizing positioning accuracy.

Inventive Principle:

Principle #5Merging (Combining)

3Reliability

If a complex system with two axes (indenter axis and reference axis) is used, then parasitic movements can be eliminated, but the large separation between axes increases measurement errors from flexure and vibration

Engineering Contradiction:

Improvestability against parasitic movementsVSAvoidmeasurement accuracy

Core Design Contradiction:

ReliabilityVSMeasurement precision

Solution Approach 1:

The patent extracts and eliminates the separate reference axis from the system. Instead of using a complex two-axis configuration with a reference tip, the invention uses a single indenter probe that performs both scanning and indentation functions, removing the source of measurement errors associated with large separations between axes while maintaining stability through the integrated design.

Inventive Principle:

Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enhances measurement accuracy to the order of nanometers, reduces measurement errors, and allows for precise control of the indenter position, improving the targeting of indentation positions and reducing the complexity of the measurement setup.

Implementation Method 1

utilizing piezoelectric actuators for accurate force control

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

a relative position sensing system that is adapted to determine the position of the indenter relative to the reference structure

Methodology Applied

Scientific EffectPosition sensing:

Implementation Method 3

A topographic tip is protruding from the reference structure and is arranged to contact said surface of said sample

Methodology Applied

Scientific EffectContact detection:

Data Source

PatentUS9970851B2Measuring head for nanoindentation instrument and measuring method

Publication Date: 2018.05.15 ANTON PAAR TRITEC SA

AI summary

A measuring head for a nano-indentation instrument, said nano-indentation instrument comprising a positioning system arranged to position a sample relative to the measuring head, the measuring head comprising:a measuring subsystem attached to a frame adapted to be connected to the nano-indentation instrument, the measuring subsystem comprising a first actuator and an indenter adapted to indent a surface of said sample under application of a force applied by the first actuator on the indenter, the measuring subsystem further comprising a force sensing system adapted to detect said force applied by the first actuator;a reference subsystem attached to said frame, the reference subsystem comprising a second actuator, a reference structure in operative connection with the second actuator, and a separation detector adapted to determine a predetermined separation of the reference structure and said surface of said sample.