Nano-particle Detection in Ultra-Pure Water via Porous Membrane

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Solution Overview

Problem

There is currently no real-time monitoring technique for detecting nano-particles in ultra-pure water, which can contaminate wafers and reticles during semiconductor fabrication processes, leading to yield rate losses.

Innovation Solution

A particle detector system is integrated into the fluid supply line, featuring a substrate with sensing and dummy nano-pores and electrodes, capable of detecting and counting nano-particles by measuring current, resistance, and capacitance variations, allowing for real-time monitoring of fluid quality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If traditional particle detection methods are used, then larger particles can be detected, but nano-particles cannot be detected in real-time

Engineering Contradiction:

Improveparticle detection capabilityVSAvoidreal-time monitoring capability

Core Design Contradiction:

Measurement precisionVSProductivity

Solution Approach 1:

The patent employs a porous membrane with controlled pore sizes that allow nano-particles to pass through while enabling detection. The membrane structure provides a large surface area for particle interaction, enabling both high precision detection of nano-particles and real-time monitoring capability simultaneously.

Inventive Principle:

Principle #31Porous materials

Solution Approach 2:

The patent replaces traditional mechanical particle detection methods with an electrical field-based detection system. By applying voltage across the porous membrane and measuring current changes or charge signals when nano-particles pass through, the system achieves real-time detection with high precision without mechanical moving parts.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Ease of manufacture

If ultra-pure water is used in semiconductor fabrication, then cleaning effectiveness is improved, but nano-particle contamination risk increases

Engineering Contradiction:

Improvecleaning effectivenessVSAvoidnano-particle contamination

Core Design Contradiction:

Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

The patent implements a real-time feedback monitoring system that continuously detects nano-particles in ultra-pure water and provides immediate alerts when contamination levels exceed thresholds. This enables proactive response to contamination events, maintaining the cleaning effectiveness of ultra-pure water while mitigating the contamination risk through timely detection and intervention.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The porous membrane acts as an intermediary between the ultra-pure water and the detection system. It allows nano-particles to pass through for detection while providing a controlled environment for measurement, enabling monitoring without compromising the purity or cleaning effectiveness of the water.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Reliability

If particle detection is implemented, then contamination is detected, but device complexity increases

Engineering Contradiction:

Improvecontamination detection accuracyVSAvoiddetection system structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The detection system is designed to perform multiple functions: it detects nano-particles, characterizes their size, and provides real-time monitoring all through a single integrated装置. The porous membrane serves both as a filter and a detection medium, reducing the need for separate components and simplifying the overall system structure while maintaining high detection accuracy.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables real-time detection and estimation of nano-particle presence and concentration in ultra-pure water, preventing contamination and ensuring higher yield rates in semiconductor processes.

Implementation Method 1

capable of detecting and counting nano-particles by measuring current, resistance, and capacitance variations

Methodology Applied

Scientific EffectElectrical current measurement: Conduction (electrical)

Implementation Method 2

capable of detecting and counting nano-particles by measuring current, resistance, and capacitance variations

Methodology Applied

Scientific EffectElectrical resistance measurement: Electrical Resistance

Implementation Method 3

capable of detecting and counting nano-particles by measuring current, resistance, and capacitance variations

Methodology Applied

Scientific EffectCapacitance measurement: Capacitance

Data Source

PatentUS11668639B2Method for processing a substrate by using fluid flowing through a particle detector

Publication Date: 2023.06.06 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

A method for processing a substrate by using fluid flowing through a particle detector is provided. The particle detector is utilized to detect nano-particles contained in fluid. The particle detector includes a substrate and a pair of sensing electrodes disposed on the substrate. The substrate includes nano-pores, wherein the pore size of the nano-pores is greater than the particle size of the nano-particles, allowing the nano-particles contained in the fluid passing through the nano-pores. The pair of sensing electrodes are positioned adjacent to at least one of the nano-pores.