Nanopore Sensor Layout Using Planar Fluidic Resistors
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Solution Overview
Problem
Nanopore sensing devices face challenges in manufacturing due to variations in nanopore formation and sensor assembly, leading to limitations in bandwidth, sensitivity, and control, particularly in solid-state nanopore sensors.
Innovation Solution
A planar fluidic resistor portion is introduced across the sensor electrode, forming a voltage divider with the nanopore resistance, facilitating easier manufacturing by using a planar structure with a dielectric layer and semiconductor processing techniques, allowing for increased area density of nanopore sensors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a fluidic resistor portion is formed by an access hole extending through the thickness of the planar structure, then the voltage divider function is achieved, but the manufacturing difficulty increases due to high aspect ratio requirements
Solution Approach 1:
The fluidic resistor portion is reconfigured from a vertical through-hole structure (extending through thickness) to a planar structure extending in the plane of the substrate. This dimensional change allows the resistor to be formed using standard planar fabrication processes rather than requiring high aspect ratio vertical holes, significantly improving manufacturability while maintaining the voltage divider function.
Solution Approach 2:
The fluidic resistor portion is divided into multiple segments or sections that can be independently formed and patterned in the planar direction. This segmentation allows for flexible design of the resistor geometry to achieve the required resistance value while avoiding the need for long, high aspect ratio through-holes.
2Reliability
If the fluidic resistor portion is made relatively long to achieve high resistance, then the voltage divider ratio is improved, but the manufacturing complexity increases
Solution Approach 1:
The fluidic resistor portion incorporates constrictions or narrow sections at specific locations within the planar structure. These localized regions of reduced cross-sectional area provide high resistance contributions without requiring the entire resistor to be long. The resistor geometry includes varying cross-sections that optimize resistance while minimizing overall length and complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration improves manufacturing ease and enhances the sensitivity and control of nanopore sensors, enabling higher area density and effective sensing of current fluctuations through nanopores.
Implementation Method 1
By providing the planar fluidic resistor portion a voltage divider is formed across the sensor electrode including the resistance of the nanopore in one leg and including the resistance of the planar fluidic resistor portion in the other leg
Implementation Method 2
the fluidic electrical potentials sensed in the passages by the sensor electrodes allow sensing of the current flowing through the passage and hence the nanopores
Data Source
Figure 1~3
Figure 4~5
Figure 6a~6j
AI summary
A nanopore sensing device comprises a planar structure provided with plural fluidic passages extending between the first and second chambers. The planar structure supports nanopores in membranes across respective passages and sensor electrodes are arranged to sense a fluidic electrical potential in respective passages between the nanopores and the second chamber. The passages comprise planar fluidic resistor portions between the sensor electrode and the second chamber, the planar fluidic resistor portions extending in a planar direction of the planar structure and being configured to form a fluidic resistor.