Nanoporous Dielectric Microdischarge Devices for Electrode Lifetime

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Solution Overview

Problem

Current microplasma devices face challenges in manufacturing cost and lifetime, particularly when driven by DC voltages and using homogeneous dielectric films, which affect their radiant efficiency and scalability for various applications.

Innovation Solution

The use of nanoporous dielectric-encapsulated electrodes in microdischarge devices and arrays, allowing for the ignition of discharges with time-varying potentials, and various geometries such as stacked, planar, and cylindrical configurations, which enhance electrode longevity and scalability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If DC voltage is used to drive microplasma devices, then the device structure is simple, but the electrode lifetime is reduced and radiant efficiency deteriorates

Engineering Contradiction:
Improvedevice structureVSAvoidelectrode lifetime
Core Design Contradiction:
Device complexityVSDuration of action of stationary object

Solution Approach 1:

The patent applies periodic action by switching from DC voltage to AC or pulsed DC voltage to drive the microplasma devices. This periodic voltage application allows the plasma to be ignited and extinguished cyclically, preventing continuous electrode erosion and extending electrode lifetime while maintaining relatively simple device structure.

Inventive Principle:
Principle #19Periodic action

2Ease of manufacture

If homogeneous dielectric films are used, then the manufacturing process is simple, but the radiant efficiency deteriorates

Engineering Contradiction:
Improvemanufacturing processVSAvoidradiant efficiency
Core Design Contradiction:
Ease of manufactureVSUse of energy by moving object

Solution Approach 1:

The patent applies local quality by transitioning from homogeneous dielectric films to composite or gradient dielectric structures. Different dielectric materials or layers with varying properties are used in specific regions to optimize plasma confinement and light emission, thereby improving radiant efficiency while keeping the manufacturing process relatively straightforward through sequential deposition techniques.

Inventive Principle:
Principle #3Local quality

3Quantity of substance

If microcavity size is reduced to increase packing density, then the pixel density increases, but the manufacturing precision requirements worsen

Engineering Contradiction:
Improvepixel densityVSAvoidmicrocavity fabrication precision
Core Design Contradiction:
Quantity of substanceVSManufacturing precision

Solution Approach 1:

The patent applies segmentation by dividing the chip into multiple microcavities with standardized dimensions and arrangements. This systematic segmentation allows for scalable fabrication processes where precision requirements are managed through modular design and repeated patterning techniques, enabling high pixel density while maintaining feasible manufacturing precision standards.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces manufacturing costs, extends electrode life, and improves radiant efficiency, enabling scalable and efficient microdischarge devices for applications like photodetection, environmental sensing, and plasma etching, while allowing for flexible and cost-effective production of microdischarge arrays.

Implementation Method 1

The electrodes are configured to ignite a discharge in a microcavity when a time-varying (an AC, RF, bipolar or a pulsed DC, etc.) potential is applied between the electrodes

Methodology Applied
Scientific EffectMicrodischarge: Electric Arc

Data Source

PatentUS7573202B2Metal/dielectric multilayer microdischarge devices and arrays
Publication Date: 2009.08.11 THE BOARD OF TRUSTEES OF THE UNIV OF ILLINOIS
  • US7573202B2 patent drawing
  • US7573202B2 patent drawing
  • US7573202B2 patent drawing

AI summary

A microdischarge device that includes one or more electrodes encapsulated in a nanoporous dielectric. The devices include a first electrode encapsulated in the nanoporous dielectric and a second electrode that may also be encapsulated with the dielectric. The electrodes are configured to ignite a microdischarge in a microcavity when an AC or a pulsed DC excitation potential is applied between the first and second electrodes. The devices include linear and planar arrays of microdischarge devices. The microcavities in the planar arrays may be selectively excited for display applications.