Nano-probe Modules for Vacuum Electrical Testing
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Solution Overview
Problem
There is a growing need for effective systems and methods to electrically test nanometric elements of electrical circuits, which existing technologies have not adequately addressed.
Innovation Solution
A system comprising a scanning electron microscope with nano-probe modules and an electro-static shield, allowing for precise electrical contact and contamination reduction, enabling concurrent testing of multiple points and easy replacement of nano-probe modules without opening the vacuum chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If nano-probe motors are operated to move nano-probes for electrical testing, then testing capability and precision are improved, but contamination is generated that degrades the vacuum environment
Solution Approach 1:
The patent extracts the harmful function (contamination generation) from the nano-probe motors by introducing a separate electro-static shield component. The shield is positioned between the motors and the vacuum chamber interior, capturing contaminants before they can enter the testing environment, thus allowing the motors to continue providing precise positioning without degrading the vacuum.
Solution Approach 2:
The electro-static shield acts as an intermediary element between the nano-probe motors and the vacuum chamber. It uses electro-static forces to attract and trap contaminants generated by the motors, serving as a mediator that allows motor operation while protecting the vacuum environment from contamination.
2Reliability
If nano-probe modules are made replaceable for maintenance, then reliability is improved, but device complexity increases due to additional replacement mechanisms
Solution Approach 1:
The patent divides the probing system into modular nano-probe modules that can be independently replaced. Each module is a self-contained unit with its own motors and probes, allowing individual module replacement without affecting the entire system. This segmentation enables maintenance and reliability improvement while keeping the replacement mechanism relatively simple through standard modular interfaces.
Solution Approach 2:
The nano-probe modules are designed with universal interfaces and standardized mounting mechanisms that allow them to be replaced without opening the vacuum chamber. The replacement mechanism serves multiple functions: module removal, new module installation, and vacuum seal maintenance, reducing overall system complexity despite the added replaceability feature.
3Measurement precision
If testing is performed inside a vacuum chamber with column illumination, then measurement precision is improved, but access for nano-probes becomes more difficult
Solution Approach 1:
The patent implements a nested configuration where the nano-probe modules are positioned within the column structure of the scanning electron microscope. The probes are located inside the column's field of view, allowing simultaneous optical access for imaging and physical access for electrical probing. This nesting enables both high-precision imaging and ease of probe operation within the same vacuum environment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This system enables accurate and efficient electrical testing of nanometric elements by reducing contamination and allowing for quick module replacement, thereby improving testing throughput and accuracy.
Implementation Method 1
The shield may be an electro-static shield that may be configured to attract at least a part of a contaminants generated by the nano-probe motors
Implementation Method 2
the column may be configured to illuminate areas of the object, with a beam of charged particles
Data Source
AI summary
A system for electrically testing an object, the system may include a scanning electron microscope that comprises a column; and nano-probe modules that are mechanically connected to the column; wherein the column is configured to illuminate areas of the object, with a beam of charged particles; wherein nano-probes of the nano-probe modules are configured to electrically contact elements of the object, during electrical tests of the object, wherein the elements of the object are located within the areas of the object.