Nanoscale Micro Assembly Using Charged Particle Beam Manipulation

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Solution Overview

Problem

Current methods lack an effective technology for the precise manipulation of nanoscale objects, which is crucial for advancements in physics, chemistry, and biology.

Innovation Solution

The use of charged particle beams, such as electron beams, to create a non-uniform charge distribution, forming a gradient force that allows for high-precision manipulation of tiny objects in three-dimensional space, including rotation, positioning, and connection of nanoscale objects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If optical tweezers are used to manipulate microscopic particles, then particles can be captured and manipulated, but the method cannot effectively manipulate nanoscale objects due to size limitations

Engineering Contradiction:
Improvemanipulation precisionVSAvoidapplicable size range
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The patent replaces optical fields with charged particle beams (electron or ion beams) to manipulate tiny objects. The charged particle beam system uses electromagnetic fields to generate gradient forces that can capture and manipulate objects at the nanoscale, overcoming the size limitation of optical tweezers while achieving high-precision manipulation.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Adaptability or versatility

If acoustic tweezers are used to capture particles, then particles greater than a few hundred nanometers can be manipulated, but smaller nanoscale objects cannot be effectively captured

Engineering Contradiction:
Improveparticle size rangeVSAvoidmanipulation precision
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent changes the physical parameters of the manipulation field by using charged particle beams with adjustable energy and charge density. This allows the gradient force to be tuned to effectively capture and manipulate objects across a wide size range from hundreds of nanometers down to molecular scales, achieving both broad adaptability and high precision.

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If charged particle beams are used to manipulate nanoscale objects, then high-precision manipulation is achieved, but complex control of position, orientation, and connection requires sophisticated adjustment mechanisms

Engineering Contradiction:
Improveassembly precisionVSAvoidbeam control system
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent makes the charged particle beam system multi-functional by using the same beam for multiple purposes: capturing objects via gradient force, moving objects by beam scanning, heating objects through energy deposition, and irradiating objects for chemical reactions. This universal approach reduces device complexity while achieving high-precision manipulation and assembly.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables 4D high-precision manipulation of nanoscale objects without physical contact, facilitating complex operations and promoting progress in various scientific fields like physics, chemistry, and biology.

Implementation Method 1

using one or more charged particle beams to move a first tiny object... According to the method, the one or more charged particle beams capture the first tiny object by using a gradient force formed by a non-uniform charge distribution

Methodology Applied
Scientific EffectGradient force: Force

Implementation Method 2

The method further includes heating the first tiny object and the second tiny object

Methodology Applied
Scientific EffectHeating: Heating

Implementation Method 3

The method further includes irradiating the first tiny object and the second tiny object; enabling the first tiny object and the second tiny object to undergo a chemical reaction

Methodology Applied
Scientific EffectIrradiation: Radiation

Data Source

PatentUS20240274403A1Micro device fabricating method and apparatus
Publication Date: 2024.08.15 ZHEJIANG UNIV
  • US20240274403A1 patent drawing
  • US20240274403A1 patent drawing
  • US20240274403A1 patent drawing

AI summary

The present invention relates to a micro device fabricating method, including providing two or more tiny objects; using one or more charged particle beams to move a first tiny object and enable the first tiny object to come into contact with a second tiny object; and connecting the first tiny object and the second tiny object. The present invention extends micro device fabricating to a nanoscale.