Nanowire Junction Crossing APD for Single Photon Detection

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Solution Overview

Problem

Existing photon detectors, such as photomultiplier tubes, are bulky, have limited linearity, low quantum efficiency, and are not well-suited for low-light applications or integration into system-on-chip platforms, and require high voltages, making them unsuitable for advanced imaging and LADAR applications.

Innovation Solution

The development of integrated circuit photon detectors using nanowire crossing regions to form avalanche photodiodes, which enable single photon detection with improved sensitivity and bandwidth by creating a junction crossing region between nanowires of different conductivity types, allowing for enhanced signal amplification and reduced dark count rates.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If photomultiplier tubes are used for photon detection, then high gain is achieved, but the device becomes bulky and requires vacuum tube technology

Engineering Contradiction:
ImprovegainVSAvoiddevice size
Core Design Contradiction:
PowerVSVolume of moving object

Solution Approach 1:

The photodetector is segmented into multiple nanowire components (first nanowire, second nanowire, third nanowire) that cross at a central region to form the active detection zone. This segmentation allows the device to achieve high gain through the nanowire junction structure while maintaining a compact form factor, eliminating the need for bulky vacuum tube photomultiplier tubes.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention transitions from planar photodetector designs to a three-dimensional nanowire crossing architecture. The nanowires extend in multiple dimensions (first nanowire in x-direction, second in y-direction, third in z-direction), creating a volumetric active region that increases detection efficiency and gain while reducing the overall device footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If conventional photodetectors are used, then photon detection is achieved, but quantum efficiency is low

Engineering Contradiction:
Improvequantum efficiencyVSAvoiddetector structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The photodetector employs composite nanowire structures with different semiconductor materials having different bandgaps. The first, second, and third nanowires are made of different semiconductor materials, allowing each to absorb specific wavelength ranges of incident light. This composite material approach increases overall quantum efficiency by capturing a broader spectrum of photons while maintaining a relatively simple nanowire crossing structure.

Inventive Principle:
Principle #40Composite materials

3Power

If photomultiplier tubes are used, then photon signal amplification is achieved, but the spectral response range is limited

Engineering Contradiction:
Improvesignal amplificationVSAvoidspectral response range
Core Design Contradiction:
PowerVSAdaptability or versatility

Solution Approach 1:

The invention uses multiple nanowires composed of different semiconductor materials with varying bandgap energies. This allows the detector to respond to a broad spectral range from ultraviolet to infrared wavelengths. Simultaneously, the nanowire crossing junction provides signal amplification through avalanche multiplication, achieving both wide spectral response and signal amplification without the limitations of conventional photomultiplier tubes.

Inventive Principle:
Principle #40Composite materials

4Power

If high voltage is applied to photomultiplier tubes for gain, then internal detector gain is achieved, but the device requires complex high voltage power supply

Engineering Contradiction:
Improveinternal detector gainVSAvoidpower supply requirements
Core Design Contradiction:
PowerVSDevice complexity

Solution Approach 1:

The invention replaces the mechanical/electrical high voltage power supply system of photomultiplier tubes with a semiconductor-based avalanche photodetector structure. The nanowire crossing junction inherently provides avalanche multiplication gain when reverse-biased, eliminating the need for complex external high voltage power supplies and associated electronics, thereby reducing overall device complexity while maintaining high internal gain.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

These nanowire-based detectors provide high sensitivity, sub-wavelength resolution, and improved spatial resolution, enabling effective low-light imaging and LADAR applications with reduced noise and increased efficiency compared to conventional detectors.

Implementation Method 1

The nanowire and the first semiconductor material form an avalanche photodiode (APD) in the junction crossing region to enable single photon detection

Methodology Applied
Scientific EffectAvalanche breakdown: Avalanche Breakdown

Implementation Method 2

The first nanowire has an intrinsic layer formed over the first semiconductor material to increase photon sensitivity

Methodology Applied
Scientific EffectPhoton absorption: Absorption (EM radiation)

Data Source

PatentUS10629767B2Nano avalanche photodiode architecture for photon detection
Publication Date: 2020.04.21 NORTHROP GRUMMAN SYSTEMS CORP
  • US10629767B2 patent drawing
  • US10629767B2 patent drawing
  • US10629767B2 patent drawing

AI summary

An integrated circuit includes a substrate material that includes an epitaxial layer, wherein the substrate material and the epitaxial layer form a first semiconductor material with the epitaxial layer having a first conductivity type. At least one nanowire comprising a second semiconductor material having a second conductivity type doped differently than the first conductivity type of the first semiconductor material forms a junction crossing region with the first semiconductor material. The nanowire and the first semiconductor material form an avalanche photodiode (APD) in the junction crossing region to enable single photon detection. In an alternative configuration, the APD is formed as a p-i-n crossing region where n represents an n-type material, i represents an intrinsic layer, and p represents a p-type material.