Nanowire Mesh Transistor Acoustic Sensor for High Sensitivity

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Solution Overview

Problem

Conventional acoustic sensors fail to meet the requirements of sensitivity, flexibility, and small size needed for applications in artificial intelligence and wearable electronics.

Innovation Solution

A transistor acoustic sensor element with a nanowire three-dimensional mesh active layer, made of polymer organic semiconductor materials, is developed, which vibrates under sound signals to enhance sensitivity, combined with graphene electrodes and a flexible substrate for improved sound detection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional acoustic sensor structures are used, then manufacturing is simpler, but sensitivity to sound signals is insufficient

Engineering Contradiction:
Improvesensitivity to sound signalsVSAvoidstructure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent transitions from conventional two-dimensional thin film structures to a three-dimensional nanowire mesh structure. The active layer comprises nanowires arranged in a mesh configuration with wire diameters of 10-100 nm and mesh sizes of 100 nm - 1 μm, creating a three-dimensional architecture that significantly increases the effective surface area for acoustic wave detection while maintaining compatibility with standard transistor fabrication processes

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The nanowire mesh structure inherently creates a porous three-dimensional network with controlled mesh sizes ranging from 100 nm to 1 μm. This porous architecture provides numerous active sites for acoustic wave interaction, enabling the sensor to detect weak sound signals effectively while maintaining structural integrity and facilitating charge transport through the material

Inventive Principle:
Principle #31Porous materials

2Adaptability or versatility

If conventional rigid sensor structures are used, then mechanical strength is maintained, but flexibility is reduced

Engineering Contradiction:
ImproveflexibilityVSAvoidmechanical strength
Core Design Contradiction:
Adaptability or versatilityVSStrength

Solution Approach 1:

The patent employs ultrathin materials throughout the device architecture, including graphene electrodes with thickness of approximately 0.3 nm, polymer electrolyte layers 100-500 nm thick, and flexible substrate materials such as PDMS. These ultrathin flexible components enable the sensor to conform to curved surfaces and withstand bending while maintaining functional integrity

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The device integrates multiple materials with complementary properties: graphene provides electrical conductivity and flexibility, polymer electrolytes provide ion transport and mechanical flexibility, nanowire semiconductor materials provide sensing functionality, and flexible substrates provide structural support with bendability. This composite architecture achieves both flexibility and mechanical strength

Inventive Principle:
Principle #40Composite materials

3Measurement precision

If conventional acoustic sensor designs are used, then device size is larger, but sensing performance is adequate

Engineering Contradiction:
Improvesensing performanceVSAvoiddevice size
Core Design Contradiction:
Measurement precisionVSVolume of moving object

Solution Approach 1:

The nanowire mesh structure creates a three-dimensional sensing volume within a thin profile. The vertical stacking of graphene electrode/polymer electrolyte/nanowire mesh/graphene electrode layers with thicknesses of 100-500 nm each enables high sensing performance in a compact vertical footprint, reducing the overall device volume while maintaining or enhancing sensitivity

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent optimizes critical dimensions at the nanoscale: nanowire diameters of 10-100 nm, mesh sizes of 100 nm - 1 μm, and layer thicknesses of 100-500 nm. These nanoscale parameter optimizations maximize the surface-to-volume ratio and active sensing area within minimal device volume, achieving high sensing performance in a compact form factor

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The sensor achieves enhanced sensitivity and flexibility, allowing for better detection of weak sound vibrations and expanded sound sensing capabilities, suitable for wearable electronics and AI applications.

Implementation Method 1

the active layer can vibrate under an action of sound signals so that the output current of the transistor acoustic sensor element changes correspondingly

Methodology Applied
Scientific EffectVibration: Vibration

Data Source

PatentUS11043644B2Transistor acoustic sensor element and method for manufacturing the same, acoustic sensor and portable device
Publication Date: 2021.06.22 BOE TECHNOLOGY GROUP CO LTD
  • US11043644B2 patent drawing
  • US11043644B2 patent drawing

AI summary

The present disclosure provides a transistor acoustic sensor element and a method for manufacturing the same, an acoustic sensor and a portable device. The transistor acoustic sensor element comprises a gate, a gate insulating layer, a first electrode, an active layer and a second electrode arranged on a base substrate, wherein the active layer has a nanowire three-dimensional mesh structure and thus can vibrate under the action of sound signals, so that the output current of the transistor acoustic sensor element changes correspondingly. Since the active layer having the nanowire three-dimensional mesh structure can sensitively sense weak vibration of acoustic waves, the sensitivity to sound signals of the transistor acoustic sensor element is improved.