An approximate S-shape keeps piezo-membrane petals aligned, reducing sound leakage and limiting dust entry into MEMS microphones.
Vacuum chamber eliminates air viscosity to boost mechanical sensitivity while shrinking back cavity volume.
A directional acoustic sensor uses a signal processor to calculate sums and differences of resonance unit outputs for precise noise attenuation.
Integrated sound generators vibrate display panels to provide audio in folded states while reducing mechanical stress.
A moving gate field effect transistor converts mechanical motion directly into electrical current through sub-threshold operation.
Placing a MEMS microphone inside the ear nozzle stabilizes the feedback loop, preventing high-pitched squeals without requiring large uncomfortable nozzles.
Segmented opposing diaphragms sum electrical signals to eliminate acceleration-induced noise from sound wave detection.
An adhesive layer surrounds the cavity with a dislocated acoustic hole, blocking micro-particles while maintaining diaphragm vibration.
A triaxial MEMS accelerometer and microphones measure airborne acoustic intensity within a lightweight solid body supported by a suspension system.
A transistor acoustic sensor element uses a nanowire three-dimensional mesh active layer to vibrate under sound signals.
Curved package structures prevent attachment material obstruction and environmental contamination at the acoustic port.
Structured MEMS diaphragms concentrate mechanical stress at attachment points to amplify measuring signals via piezoelectric detection.
Varying stopper protruding lengths match diaphragm displacement patterns to optimize contact surface area.
A portless microphone uses capacitive sensing to detect sound pressure changes in air without mechanical transducers.
Stacked substrates with conductive plugs integrate CMOS circuits into a compact MEMS microphone, reducing manufacturing complexity.
A fluid diode in a loudspeaker enclosure manages air density and pressure cycling to improve audio reproduction quality.
A directional microphone cover member increases the pressure gradient across a resonator array to enhance acoustic sensitivity.
Stress concentrator bridges amplify mechanical pressure on MEMS sensor plates, improving sensitivity while reducing manufacturing complexity.
A piezoelectric transducer design segments vibration portions with connection and free ends to release internal stress.
Dual-mode activation of bistable diaphragms reduces total harmonic distortion by compensating superimposed vibrations.
An optical MEMS microphone replaces capacitive sensing with interferometry to eliminate viscous damping and thermal noise.
Mechanical resonance separates audio bands to eliminate Fourier transformation power consumption.
Thin-film resistive heating elements replace moving parts to reduce exhaust noise, lowering system weight and backpressure.
An integrated circuit within the MEMS device detects sound activity events to reduce computational load on microprocessors and minimize energy consumption.
Adhesive bonding joins silicon MEMS chips to substrates forming sealed acoustic chambers reducing package volume while maintaining sensitivity.
An electret microphone reduces leakage current by replacing silicon oxide insulators with a semiconductor channel and electret surface.
Plated regions on an interposer electrically connect lid and base components, preserving cavity volume for improved acoustic performance.
Holed polycrystalline silicon membranes vent pressurized air to prevent fracture during high-amplitude sound waves.
An embedded system with a microphone array processes mill sound signals via an FPGA for real-time analysis.
Conductive aperture walls maintain strong electrostatic fields across the membrane to overcome rapid field strength fall-off toward the center of apertures.
A spacer element limits membrane deflection in MEMS sound transducers.