Nanowire NEMFET Switching via Electrostatic Deflection

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional transistors face limitations in switching speed and power consumption due to thermodynamic constraints and mechanical contact reliability, particularly in two-terminal NEMS switches and CMOS technology, which struggle with high subthreshold slope and large threshold voltage requirements.

Innovation Solution

The development of a three-terminal nano-electro-mechanical field-effect transistor (NEMFET) utilizing a suspended nanowire channel with a dielectric coating and mechanical resonating frequency, allowing for high-speed operation and low standby power consumption by modulating current through electrostatic attraction without electrical contact between the gate and nanowire, achieving zero sub-threshold slope and operational speeds beyond 120 MHz.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Extent of automation

If a two-terminal NEMS switch is used, then abrupt on/off switching is achieved, but the device has no control over on/off current and requires large threshold voltage

Engineering Contradiction:
Improveswitching controlVSAvoidthreshold voltage
Core Design Contradiction:
Extent of automationVSUse of energy by moving object

Solution Approach 1:

The device is segmented into three terminals (source, drain, and gate) instead of two terminals. The gate terminal is separated and positioned above the nanowire channel, allowing independent control of current flow between source and drain without requiring large threshold voltages for mechanical contact changes.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The gate electrode acts as an intermediary that modulates the electrical potential of the nanowire channel without direct mechanical contact. By applying gate voltage, the channel's conductance is controlled through electrostatic field effects, enabling precise current control with low threshold voltages.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of operation

If a three-terminal suspended gate NEMS FET is used, then current control from source to drain is achieved, but operational speed is limited to several MHz due to large mass of moving components

Engineering Contradiction:
Improvecurrent controlVSAvoidoperational speed
Core Design Contradiction:
Ease of operationVSSpeed

Solution Approach 1:

The dimensions of the moving components are changed from micrometer scale to nanometer scale. The nanowire channel has diameter of 10-100 nm and the gate electrode is positioned at nanometer distances, reducing the mass of moving parts by several orders of magnitude while maintaining effective electrostatic control of current.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The device transitions from planar two-dimensional geometry to three-dimensional nanoscale structure. The nanowire channel is suspended in three-dimensional space above the gate electrode, creating vertical electric field coupling that enhances control efficiency and reduces the mass of moving components compared to planar configurations.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Ease of operation

If conventional MOSFETs are used, then current flow is controlled by gate voltage, but subthreshold slope is limited by thermodynamic constraints

Engineering Contradiction:
Improvegate controlVSAvoidsubthreshold slope
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The device replaces the conventional MOSFET's thermodynamic charge modulation mechanism with a nanoelectromechanical system. The nanowire channel is mechanically suspended and can be pulled toward or away from the gate electrode through electrostatic forces, creating an all-or-nothing conductance state that eliminates the gradual subthreshold transition region.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The device exploits a mechanical phase transition analogous to the pull-in/pull-out instability. When gate voltage exceeds a threshold, the nanowire abruptly transitions from a suspended state to a contacted state, creating discontinuous conductance change with effectively zero subthreshold slope, similar to how phase transitions create abrupt changes in material properties.

Inventive Principle:
Principle #36Phase transitions

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The NEMFET design enables abrupt on/off switching with minimal transition period, reduced standby power consumption, and operational speeds exceeding 120 MHz, addressing the limitations of conventional transistors by leveraging nanoscale mechanical deformation and electrostatic coupling.

Implementation Method 1

modulating current through electrostatic attraction without electrical contact between the gate and nanowire

Methodology Applied
Scientific EffectElectrostatic attraction: Electrostatics

Implementation Method 2

leveraging nanoscale mechanical deformation and electrostatic coupling

Methodology Applied
Scientific EffectMechanical deformation: Deformation

Implementation Method 3

operational speeds exceeding 120 MHz, addressing the limitations of conventional transistors by leveraging nanoscale mechanical deformation and electrostatic coupling

Methodology Applied
Scientific EffectMechanical resonance: Resonance

Data Source

PatentUS9793417B2Nanowire nanoelectromechanical field-effect transistors
Publication Date: 2017.10.17 RGT UNIV OF CALIFORNIA
  • US9793417B2 patent drawing
  • US9793417B2 patent drawing
  • US9793417B2 patent drawing

AI summary

A three-terminal nano-electro-mechanical field-effect transistor (NEMFET) includes a source electrode, a gate electrode, a drain electrode and a nanoelectromechanically suspended channel bridging the source electrode and the drain electrode. The nanoelectromechanically suspended channel includes a moveable nanowire and a dielectric coating on a surface of the nanowire facing the gate electrode. A thickness of a gap between the nanowire and the gate electrode is determined by a thickness of the dielectric coating.