Cantilever NEM decoders over memory arrays enable random cell access while cutting CMOS decoder area and tuning decoupling capacitance.
Reversible GeTe phase expansion drives a non-volatile nano relay, balancing high work density with stable MEMS/NEMS switching.
Cantilever NEM decoders embedded above memory cells shift word and bit line access into interconnect layers, reducing CMOS area overhead.
A laminated graphene-polymer membrane over tapered cavities controls drying-induced tension and improves NEMS yield and stability.
Reversible GeTe phase transitions create about 10% volume change, enabling non-volatile nano relay actuation with stable room-temperature operation.