Acceleration Sensor With Nested Masses for Multi-Axis Detection
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Solution Overview
Problem
Existing acceleration sensors suffer from low sensitivity and low space utilization rate.
Innovation Solution
The acceleration sensor design includes a base, first and second seesaw units forming an annular structure, with inner and outer mass units connected by elastic members, and detection units for in-plane and out-of-plane acceleration, utilizing X-axis and Y-axis single-degree-of-freedom springs and symmetrically arranged detection capacitor groups.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional acceleration sensor structure is used, then the device is simple to manufacture, but the sensitivity and space utilization rate are low
Solution Approach 1:
The patent implements a nested mass unit structure where the inner side mass unit is positioned inside the outer side mass unit, and both are elastically connected to the same anchor point. This nested configuration allows multiple detection masses to occupy the same spatial region, increasing the effective detection mass without proportionally increasing the device footprint, thereby improving sensitivity while controlling structural complexity.
Solution Approach 2:
The patent designs the mass units to serve multiple functions: they act as detection masses for acceleration sensing, provide elastic support through their connection structures, and enable detection in multiple directions (in-plane and out-of-plane) through their geometric configuration. This multi-functionality improves measurement precision without requiring separate components for each function, thus avoiding excessive complexity.
2Measurement precision
If multiple detection masses are used to improve sensitivity, then the measurement precision increases, but the space utilization rate decreases
Solution Approach 1:
The patent places the inner side mass unit inside the outer side mass unit, allowing both masses to occupy overlapping spatial regions. This nested arrangement effectively stacks detection masses in three-dimensional space rather than spreading them out in two dimensions, thereby increasing the total detection mass for improved sensitivity without proportionally increasing the device footprint, thus maintaining high space utilization rate.
Solution Approach 2:
The patent transitions from a two-dimensional planar arrangement of detection masses to a three-dimensional nested configuration. By utilizing the vertical dimension and spatial overlap, the design accommodates multiple detection masses within a compact footprint, improving detection accuracy while maintaining efficient space utilization in the planar directions.
3Adaptability or versatility
If elastic connections are used to support multi-axis movement, then the detection capability in multiple directions is improved, but the device complexity increases
Solution Approach 1:
The patent designs the elastic connection structures (such as the elastic arms connecting mass units to the anchor point) to provide support and enable movement in multiple directions simultaneously. These same elastic connections also serve as the mechanical linkage for force transmission and act as structural support elements. This multi-functionality achieves multi-axis detection capability without requiring separate mechanisms for each function, thus controlling device complexity.
4Area of stationary object
If a compact structure is used to improve space utilization, then the area efficiency increases, but the sensitivity decreases
Solution Approach 1:
The patent achieves a compact structure by nesting the inner side mass unit inside the outer side mass unit. This configuration maximizes the use of three-dimensional space within the device footprint. Simultaneously, the nested masses are elastically connected to provide sufficient movement range for detection, thereby maintaining sensitivity despite the compact arrangement. The elastic connections ensure that the compact structure does not overly constrain the detection masses.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances sensitivity and space utilization, improving detection accuracy and anti-interference capabilities by sharing detection mass and using elastic connections to support movement in multiple axes.
Implementation Method 1
the inner side mass unit and an outer side mass unit, the inner side mass unit surrounding an outer side of the first anchor point and being elastically connected to the first anchor point, and the outer side mass unit surrounding an outer side of the inner side mass unit and being elastically connected to the inner side mass unit
Implementation Method 2
a first acceleration detection unit and a second acceleration detection unit, at least a part of the first acceleration detection unit being arranged at the annular structure and configured to detect acceleration in an out-of-plane Z-axis direction, the second acceleration detection unit being arranged at the outer side mass unit and configured to detect acceleration in an in-plane X-axis direction and in an in-plane Y-axis direction
Data Source
AI summary
Provided is an acceleration sensor, including a base; a first anchor point fixed to a middle part of the base; an inner side mass unit surrounding an outer side of the first anchor point, an outer side mass unit surrounding an outer side of the inner side mass unit, a first seesaw unit and a second seesaw unit arranged opposite to each other to define an annular structure surrounding an outer side of the outer side mass unit, a first acceleration detection unit and a second acceleration detection unit. Part of the first acceleration detection unit is arranged at the annular structure to detect acceleration in an out-of-plane Z-axis direction, the second acceleration detection unit is arranged at the outer side mass unit to detect acceleration in an in-plane X-axis direction and in an in-plane Y-axis direction. A design thereof is reasonable and the sensitivity is high.