Nested Sealing Ring Assembly for High-Temperature Process Gases

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing sealing assemblies for high-temperature applications, such as those in semiconductor manufacturing, face issues with thermal expansion and damage due to insufficient space for expansion and exposure to aggressive process gases, leading to potential seal failure.

Innovation Solution

A sealing assembly design featuring an outer and inner ring configuration with inwardly and outwardly extending projections, respectively, that enclose an elastomeric center sealing ring, allowing for thermal expansion while protecting it from damage, using materials like metals, metal alloys, and fluoropolymers to accommodate temperatures up to 300°C.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a standard vacuum seal design with a metal centering ring is used, then the assembly is suitable for room temperature to 100°C applications, but the seal is exposed to process gases and insufficient space for thermal expansion causes damage at higher temperatures

Engineering Contradiction:

Improveseal reliabilityVSAvoidexposure to process gases and thermal expansion damage

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent implements a nested structure where the elastomeric sealing ring is positioned between an inner metal ring and an outer metal ring. The inner ring has an outwardly extending projection that fits into a groove on the sealing ring, while the outer ring has an inwardly extending projection that also engages the sealing ring. This nested configuration protects the sealing ring from direct exposure to process gases while providing space for thermal expansion.

Inventive Principle:

Principle #7Nested doll (Nesting)

Solution Approach 2:

The sealing assembly is segmented into three distinct components: an inner metal ring, an elastomeric sealing ring, and an outer metal ring. Each component serves a specific function - the inner ring provides structural support and positioning, the elastomeric ring provides the sealing function, and the outer ring provides additional support and protection. This segmentation allows each component to be optimized for its specific role while working together as a unified system.

Inventive Principle:

Principle #1Segmentation

2Device complexity

If prior art designs with metal centering rings are used, then the assembly structure is simple, but there is insufficient space for thermal expansion of the seal at temperatures above 100°C

Engineering Contradiction:

Improveassembly structureVSAvoidthermal expansion space

Core Design Contradiction:

Device complexityVSVolume of moving object

Solution Approach 1:

The patent utilizes the radial dimension by extending projections from both the inner and outer rings toward the sealing ring. This creates a three-dimensional configuration where the sealing ring is positioned between two metal rings with projections extending in opposite directions. This dimensional approach maximizes the use of available space while providing adequate room for thermal expansion of the elastomeric sealing ring.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

3Ease of manufacture

If the sealing ring is directly exposed in prior art designs, then the assembly is easier to manufacture, but the seal is damaged by aggressive process gases in high temperature applications

Engineering Contradiction:

Improveassembly manufacturingVSAvoiddamage from aggressive process gases

Core Design Contradiction:

Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

The patent introduces metal rings with projections as intermediary structures between the elastomeric sealing ring and the process gases. These metal rings serve as protective barriers that shield the elastomeric sealing ring from direct contact with aggressive process gases while still allowing the sealing function to be performed. The projections on the metal rings engage with grooves on the sealing ring, providing mechanical support and protection simultaneously.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design provides adequate thermal expansion space, maintains a cohesive assembly, and reduces direct exposure to process gases, preventing seal damage and failure in high-temperature environments.

Implementation Method 1

allowing for thermal expansion of the center sealing ring

Methodology Applied

Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS11085564B2Sealing rings and sealing ring assemblies for high temperature end applications

Publication Date: 2021.08.10 GREENE TWEED TECHNOLOGIES INC

AI summary

Sealing assemblies are described herein useful for high temperature applications, as well as applications involving aggressive chemical reactants, byproducts and/or reaction environments. The assemblies include an outer ring having an interior surface having two inwardly extending projections defining a seal receiving area, an inner ring having an exterior surface having two outwardly extending projections defining a seal receiving area; and a center sealing ring configured to be positioned within the seal receiving areas of the outer ring and the inner ring. When the sealing assembly is installed in a high temperature application, the elastomeric center sealing ring is enclosed within the outer and the inner rings so as to protect the center sealing ring while allowing for thermal expansion of the center sealing ring. In further embodiments, bonded sealing ring bodies are disclosed as well.