Multi-Section Neural Network for Time-Series Abnormality Detection

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing abnormality detection techniques in manufacturing processes, such as semiconductor production, struggle to achieve high precision in identifying abnormalities from time series data sets.

Innovation Solution

The development of an abnormality detecting device that utilizes a neural network with multiple network sections and a concatenation section to process time series data sets, allowing for the training of a model that accurately identifies abnormality levels by comparing combined output results with predefined abnormality levels.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a single neural network is used for abnormality detection, then the device complexity is low, but the measurement precision of abnormality detection is insufficient

Engineering Contradiction:
Improveabnormality detection precisionVSAvoidneural network structure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The neural network is divided into multiple independent network sections (first network section, second network section, etc.), each processing different aspects of the time series data. This segmentation allows each section to specialize in detecting specific patterns while maintaining overall system manageability and improving detection precision through diversified analysis.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Multiple network sections are combined through a concatenation section that integrates their output data. This merging strategy consolidates the detection results from different network sections, creating a comprehensive abnormality detection model that leverages the strengths of each individual section while achieving high precision.

Inventive Principle:
Principle #5Merging (Combining)

2Measurement precision

If multiple network sections are used to process time series data sets, then the measurement precision improves, but the device complexity increases

Engineering Contradiction:
Improveabnormality level identification accuracyVSAvoidneural network configuration complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The complex neural network is segmented into multiple functional network sections, each handling specific processing tasks. This segmentation reduces the complexity burden on individual components while maintaining high overall precision through coordinated operation of multiple specialized sections.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Each network section is designed to process time series data sets with universal applicability to different abnormality types. The modular design allows the same structural pattern to be replicated across multiple sections, reducing configuration complexity through standardization while maintaining detection accuracy.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Measurement precision

If time series data sets are processed through multiple network sections with concatenation, then the abnormality detection precision increases, but the processing time increases

Engineering Contradiction:
Improveanomaly level detection accuracyVSAvoiddata processing time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

Multiple network sections process time series data sets in parallel rather than sequentially, performing preliminary analysis simultaneously. This parallel processing approach eliminates the time penalty of multiple processing stages while maintaining the precision benefits of comprehensive analysis through the concatenation section.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS12327186B2Abnormality detecting device and abnormality detecting method
Publication Date: 2025.06.10 TOKYO ELECTRON LTD
  • US12327186B2 patent drawing
  • US12327186B2 patent drawing
  • US12327186B2 patent drawing

AI summary

An abnormality detection device trains a model using multiple network sections each configured to process acquired time series data sets and a concatenation section configured to combine output data output from each of the multiple network sections and to output, as a combined result, a result of combining the output data output from each of the multiple network sections. The trained model is then applied to adapt a unit of process performed during manufacture of a processed object.