Non-Contact Constrained Drive Stage for Long-Stroke Positioning

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Solution Overview

Problem

Existing driving apparatuses that use elastic members for supporting objects face challenges in achieving a wide movable range in the driving direction while maintaining high rigidity in non-driving directions, leading to increased driving errors and reduced position stability due to limitations in directional rigidity adjustment.

Innovation Solution

The driving apparatus incorporates a holding member, a support member, and a plurality of actuators, along with a non-contact constrainer that constrains the holding member's position in non-driving directions, allowing for increased rigidity in non-driving directions without compromising driving accuracy, thereby enhancing the movable range and reducing errors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Length of moving object

If the rigidity of the elastic member is decreased in the driving direction to achieve a longer stroke, then the movable range is improved, but the rigidity in the non-driving direction also decreases, causing an increase in driving error

Engineering Contradiction:
Improvestroke lengthVSAvoiddriving error
Core Design Contradiction:
Length of moving objectVSManufacturing precision

Solution Approach 1:

The support function is segmented into two independent components: the elastic member handles driving direction support, while the constrainer handles non-driving direction support. This segmentation allows each component to be optimized independently for its specific function.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The constrainer acts as an intermediary component that provides the missing non-driving direction support. It mediates between the elastic member's driving function and the system's overall positional stability requirement.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Manufacturing precision

If the rigidity in the non-driving direction is increased to reduce driving error, then the position stability is improved, but the movable range in the driving direction is limited

Engineering Contradiction:
Improveposition stabilityVSAvoidmovable range
Core Design Contradiction:
Manufacturing precisionVSLength of moving object

Solution Approach 1:

The support function is segmented into two independent parts: the elastic member provides flexibility for driving direction movement, while the constrainer provides rigidity for non-driving direction stability. This enables both large movable range and high position stability simultaneously.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different rigidity characteristics are applied locally to different directions: the elastic member provides low rigidity in the driving direction for large stroke, while the constrainer provides high rigidity in the non-driving direction for positional stability.

Inventive Principle:
Principle #3Local quality

3Length of moving object

If the thrust is increased to achieve a longer stroke with the elastic member, then the movable range is improved, but the device complexity and required actuator capacity increase

Engineering Contradiction:
Improvedrive strokeVSAvoidactuator capacity
Core Design Contradiction:
Length of moving objectVSDevice complexity

Solution Approach 1:

The constrainer acts as a mediator that takes over the burden of maintaining positional stability, allowing the elastic member to operate with lower thrust requirements while achieving the same effective stroke length.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The system dynamically switches between elastic deformation for driving motion and constrainer contact for stability maintenance, optimizing the force distribution and reducing the required actuator capacity.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration increases the rigidity ratio in non-driving to driving directions, reducing driving errors and position instability, while allowing for a longer drive stroke without increased thrust, and ensures high position reproducibility even without applied force.

Implementation Method 1

an elastic member 4 having a first direction along which a thrust of the actuator 5 acts and a second direction different from the first direction; a support member 3 configured to support the holding member 2 via the elastic member 4

Methodology Applied
Scientific EffectElasticity: Elasticity

Data Source

PatentUS12140874B2Driving apparatus, exposure apparatus, and article manufacturing method
Publication Date: 2024.11.12 CANON KK
  • US12140874B2 patent drawing
  • US12140874B2 patent drawing
  • US12140874B2 patent drawing

AI summary

A driving apparatus includes a holding member configured to hold an object to be driven, a support member configured to support the holding member via an elastic member, a plurality of actuators configured to drive the holding member holding the object, and a constrainer configured to constrain, in a non-contact manner, a position of the holding member with respect to the support member in anon-driving direction different from a drivable direction which is a direction in which the holding member can be driven by the plurality of actuators.