Organic Electroluminescent Deposition Nozzles for Uniform Profiles

Solution Overview

Problem

Conventional organic vapor jet printing (OVJP) methods for depositing materials in organic light-emitting diodes (OLEDs) face challenges in achieving uniform thickness profiles in a single pass, leading to increased processing time and potential contamination between neighboring sub-pixel areas.

Innovation Solution

A depositor with a split delivery aperture and offset nozzle design, utilizing exhaust and confinement gas flows, allows for a single-pass deposition of a trapezoidal profile with high uniformity, reducing the need for multiple passes and minimizing contamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional OVJP methods are used for depositing materials in OLEDs, then the deposition process can be completed, but the thickness profile uniformity is poor and multiple passes are required

Engineering Contradiction:

Improvethickness profile uniformityVSAvoidprocessing time

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

The delivery aperture is divided into multiple segments (first delivery aperture and second delivery aperture) positioned at different locations within the nozzle. This segmentation allows different regions of the aperture to contribute to different areas of the deposition profile, enabling a single-pass process to achieve uniform thickness distribution that would otherwise require multiple passes with a conventional single aperture.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The invention transitions from a conventional single-point delivery approach to a multi-point distributed delivery system by positioning multiple delivery apertures at different spatial locations within the nozzle. This dimensional redistribution of material sources creates a composite deposition profile with enhanced uniformity across the substrate surface in a single pass.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Manufacturing precision

If multiple passes are used to achieve uniform deposition, then thickness uniformity can be improved, but processing time increases and contamination risk increases

Engineering Contradiction:

Improvedeposition uniformityVSAvoidprocessing time

Core Design Contradiction:

Manufacturing precisionVSLoss of time

Solution Approach 1:

The delivery aperture is divided into multiple segments (first delivery aperture and second delivery aperture) positioned at different locations within the nozzle. This segmentation allows different regions of the aperture to contribute to different areas of the deposition profile, enabling a single-pass process to achieve uniform thickness distribution that would otherwise require multiple passes with a conventional single aperture.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The invention enables continuous single-pass deposition by distributing material delivery across multiple apertures simultaneously active during one pass. This eliminates the need to stop, reposition, and repeat deposition passes, maintaining continuous material delivery and reducing both time and contamination exposure.

Inventive Principle:

Principle #20Continuity of useful action

3Manufacturing precision

If multiple passes are used for deposition, then uniformity can be achieved, but contamination between neighboring sub-pixel areas increases

Engineering Contradiction:

Improvedeposition uniformityVSAvoidcontamination

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The delivery aperture is divided into multiple segments (first delivery aperture and second delivery aperture) positioned at different locations within the nozzle. This segmentation allows different regions of the aperture to contribute to different areas of the deposition profile, enabling a single-pass process to achieve uniform thickness distribution that would otherwise require multiple passes with a conventional single aperture.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The invention rushes through the deposition process in a single continuous pass rather than repeatedly traversing the substrate multiple times. This eliminates repeated exposure of neighboring sub-pixel areas to potential contamination sources during multiple passes, reducing cross-contamination risk while achieving the required uniformity.

Inventive Principle:

Principle #21Skipping (Rushing through)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances deposition uniformity, reduces processing time, and minimizes contamination, thereby improving the operational lifetime and efficiency of OLED fabrication.

Implementation Method 1

Each depositor includes a delivery aperture surrounded by exhaust apertures

Methodology Applied

Scientific EffectGas flow: Convection

Implementation Method 2

utilizing exhaust and confinement gas flows

Methodology Applied

Scientific EffectGas flow confinement: Convection

Implementation Method 3

organic vapor jet printing (OVJP) methods for depositing materials

Methodology Applied

Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Data Source

PatentUS20250333835A1Organic electroluminescent devices

Publication Date: 2025.10.30 UNIVERSAL DISPLAY CORP

AI summary

A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.