OLED Anode Groove Layout to Prevent Etching Exposure
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Solution Overview
Problem
In OLED display manufacturing, the anode metal is prone to exposure during etching, leading to uneven brightness and potential short circuits due to the Ag film layer retreating and oxidizing, which affects the display effect.
Innovation Solution
A display panel design featuring a planarization layer with grooves that house the anode, allowing the pixel definition layer to cover the anode ends, preventing exposure and oxidation, and including a transition layer to protect the source-drain layer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the etching time is prolonged to ensure no etching residue at the lower ITO film layer, then the etching completeness is improved, but the Ag film layer retreats severely and the anode metal is exposed
Solution Approach 1:
The patent applies preliminary action by forming a protective layer (such as a sacrificial layer or modified etch stop layer) before the etching process. This protective layer is designed to be removed or penetrated in a controlled manner before the final etching step, preventing the Ag film layer from retreating excessively while still allowing complete removal of the lower ITO film layer. The protective structure is prepared in advance to guide the etching process and prevent metal exposure.
Solution Approach 2:
The patent employs parameter changes by modifying the etching process parameters, such as using selective etching rates for different layers, adjusting etchant composition, or controlling etching depth precisely. By changing the etching parameters to be more selective, the process can remove the lower ITO film layer completely while stopping before exposing the Ag film layer, thus resolving the contradiction between etching completeness and preventing metal exposure.
2Ease of manufacture
If the PDL is made thin to reduce material usage and cost, then the manufacturing cost is reduced, but the anode metal becomes exposed and oxidizes
Solution Approach 1:
The patent introduces an intermediary protective structure, such as a transition layer or modified PDL configuration, that acts as a mediator between the anode metal and the environment. This intermediary layer provides the necessary protection against oxidation and moisture while allowing the PDL to remain thin for cost efficiency. The intermediary structure may include encapsulation layers or protective coatings that prevent harmful factors from reaching the anode metal.
3Manufacturing precision
If the Ag film layer is etched more to remove residue, then the etching completeness is improved, but the Ag film layer retreats and forms bumps that cause short circuits
Solution Approach 1:
The patent applies local quality by making the protective structure or etch stop layer non-uniform in thickness or composition. The protective layer is designed to be thicker or more resistant in regions where the Ag film layer is more vulnerable to retreat, while being thinner or more permeable in regions where complete etching is critical. This localized variation in protective quality prevents uniform retreat and bump formation while maintaining etching completeness where needed.
Data Source
AI summary
The present application provides a display panel, a manufacturing method for a display panel, and a display apparatus. The display panel includes an array substrate including a planarization layer, the planarization layer being provided with a groove; a pixel definition layer (PDL) arranged on the planarization layer and filling the groove, the PDL being provided with a pixel opening; and an anode arranged between the planarization layer and the PDL, an end of the anode being placed in the groove, and a middle portion of the anode being exposed in the pixel opening.