OLED Anode and Pad Cover Electrode Single Mask Process
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional organic light emitting display devices require multiple mask processes, increasing manufacturing time and costs, and lowering yield due to the complexity of forming anodes and pad cover electrodes simultaneously.
Innovation Solution
The method involves forming thin film transistors on a substrate, connecting an anode to these transistors, and creating a bank along the edge of the anode, all within a single mask process, which reduces the number of mask processes needed and simplifies the manufacturing process by protecting the pad cover electrode during etching with a photosensitive film.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple mask processes are used to form anodes and pad cover electrodes separately, then manufacturing precision is improved, but manufacturing time and costs increase, and productivity decreases
Solution Approach 1:
The patent combines the formation of anodes and pad cover electrodes into a single mask process. A photosensitive film is formed to simultaneously define both the anode pattern and pad cover electrode pattern, allowing both structures to be created in one exposure and development step rather than requiring separate mask processes. This merging of operations maintains manufacturing precision while significantly improving productivity by reducing the total number of process steps.
Solution Approach 2:
The photosensitive film serves multiple functions: it acts as a mask for anode formation, as a mask for pad cover electrode formation, and provides protection during subsequent etching processes. By making the photosensitive film multi-functional, the patent eliminates the need for multiple specialized mask films and processes, thereby improving manufacturing efficiency without sacrificing precision.
2Manufacturing precision
If multiple mask processes are used to form anodes and pad cover electrodes separately, then manufacturing precision is improved, but manufacturing costs increase
Solution Approach 1:
The patent combines the formation of anodes and pad cover electrodes into a single mask process. A photosensitive film is formed to simultaneously define both the anode pattern and pad cover electrode pattern, allowing both structures to be created in one exposure and development step rather than requiring separate mask processes. This merging of operations maintains manufacturing precision while significantly improving productivity by reducing the total number of process steps.
Solution Approach 2:
The photosensitive film is used as a temporary protective structure during the etching process and is subsequently removed (discarded) after serving its purpose. By using the photosensitive film as a sacrificial protective layer that can be easily removed, the patent avoids the need for additional permanent protective structures, thereby reducing manufacturing complexity and cost while maintaining precision.
3Manufacturing precision
If multiple mask processes are used to form anodes and pad cover electrodes separately, then manufacturing precision is improved, but the number of process steps increases
Solution Approach 1:
The patent combines the formation of anodes and pad cover electrodes into a single mask process. A photosensitive film is formed to simultaneously define both the anode pattern and pad cover electrode pattern, allowing both structures to be created in one exposure and development step rather than requiring separate mask processes. This merging of operations maintains manufacturing precision while significantly improving productivity by reducing the total number of process steps.
Solution Approach 2:
The photosensitive film is formed in advance to simultaneously define both the anode and pad cover electrode patterns before any etching or deposition processes begin. This preliminary patterning action establishes both structures' boundaries upfront, eliminating the need for subsequent separate mask alignment steps and reducing overall process complexity while maintaining precision.
4Manufacturing precision
If photosensitive film is used to protect pad cover electrode during etching, then manufacturing precision is improved, but the structure complexity increases
Solution Approach 1:
The photosensitive film is used as a temporary protective structure during the etching process and is subsequently removed (discarded) after serving its purpose. By using the photosensitive film as a sacrificial protective layer that can be easily removed, the patent avoids the need for additional permanent protective structures, thereby reducing manufacturing complexity and cost while maintaining precision.
Solution Approach 2:
The photosensitive film acts as an intermediary protective layer between the pad cover electrode and the etching process. It temporarily shields the pad cover electrode during etching without requiring permanent structural modifications, and can be easily removed afterward. This intermediary approach provides protection without permanently increasing device structural complexity.
Data Source
AI summary
Disclosed are an organic light emitting display device and a method of manufacturing the same. In the organic light emitting display, an anode connected to a thin film transistor and a bank disposed along the edge of the anode are simultaneously formed through one mask process, and a partition is formed to cover the side surface of the anode, thereby preventing damage to a pad cover electrode by an etching solution or etching gas of the anode without any separate pad protective film.