Organic Light-Emitting Display Manufacturing via Continuous Deposition
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Solution Overview
Problem
The existing methods for manufacturing organic light-emitting display apparatuses face challenges in producing large-scale devices with high-definition patterns due to issues with fine metal mask (FMM) bending and the time-consuming process of aligning and separating substrates and masks, leading to low production efficiency.
Innovation Solution
A method involving continuous deposition of organic layers and electrodes using a thin film deposition apparatus with a patterning slit sheet, allowing for the formation of linear patterns on large substrates without the need for precise alignment of large masks, and subsequent removal of organic layers using plasma etching.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a large fine metal mask is used for deposition on large substrates, then the pattern coverage is improved, but the mask bends due to self-gravity causing pattern distortion
Solution Approach 1:
The patent divides the large substrate into multiple smaller panels arranged in an array. Each panel is deposited separately using a smaller fine metal mask, avoiding the need for a single large mask that would bend under gravity. The segmentation allows each mask to maintain its structural integrity while covering the entire large substrate area through multiple discrete deposition regions.
Solution Approach 2:
The patent transitions from a single-plane deposition approach to a multi-panel array configuration. By arranging multiple panels in a two-dimensional array and depositing each panel separately, the system achieves coverage of large substrate areas without requiring a single large mask, thus eliminating gravity-induced bending while maintaining pattern precision.
2Manufacturing precision
If traditional FMM alignment and separation processes are used, then deposition quality is maintained, but manufacturing time increases and production efficiency decreases
Solution Approach 1:
The patent performs alignment and deposition operations on individual panels before final assembly. By pre-aligning and depositing each panel separately while they are in a convenient position, the system avoids time-consuming alignment and separation operations on the complete large substrate, thereby maintaining deposition quality while significantly reducing total manufacturing time.
Solution Approach 2:
The patent implements continuous deposition across multiple panels without interruption. The deposition process operates continuously on each panel in sequence, eliminating the need to stop and separate large masks from the substrate. This continuous operation maintains high deposition quality while maximizing production efficiency through uninterrupted manufacturing flow.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enables efficient mass production of large organic light-emitting display apparatuses with high-definition patterning, improving production speed and reducing defects by avoiding the limitations of traditional FMM techniques.
Implementation Method 1
a thin film deposition apparatus spaced apart from a substrate on which a pattern is to be formed; moving at least one of the thin film deposition apparatus or the substrate relative to the other during the depositing; spraying the deposition material from the deposition source to be deposited by passing through the patterning slit sheet
Implementation Method 2
the removing of the organic layer between the adjacent panels may include removing the organic layer by using chemical etching using plasma containing oxygen (O2)
Data Source
AI summary
A method of manufacturing an organic light-emitting display apparatus and an organic light-emitting display apparatus manufactured by using the method. A method of manufacturing an organic light-emitting display apparatus includes continuously depositing an organic layer of a linear pattern on a substrate; depositing a second electrode on the organic layer; and forming a passivation layer on the second electrode to cover the second electrode.