OLED Deposition Nozzle Inclination Angle Optimization

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Solution Overview

Problem

Existing deposition methods for organic light emitting diode (OLED) displays face challenges in achieving uniform deposition and high resolution due to the shadow phenomenon where organic material penetrates between the deposition mask and the substrate, leading to reduced deposition margin and efficiency.

Innovation Solution

A deposition apparatus with a deposition source and spray nozzles arranged in a specific configuration, where the center area and outer areas of the source are aligned with the substrate, and the spray nozzles are inclined at controlled angles to optimize the incident angle of the deposition material, reducing the shadow effect and enhancing deposition uniformity and efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If deposition material is sprayed at conventional angles, then deposition coverage is achieved, but shadow phenomena and non-uniform deposition occur

Engineering Contradiction:
Improvedeposition uniformityVSAvoidshadow phenomena
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The patent applies parameter changes by optimizing the spray angle parameter to a specific range of 43-53 degrees. This angular parameter modification transforms the deposition trajectory to eliminate shadow phenomena while ensuring complete substrate coverage, directly resolving the contradiction between achieving deposition coverage and avoiding shadow effects

Inventive Principle:
Principle #35Parameter changes

2Area of stationary object

If spray nozzles are arranged to cover the substrate, then deposition area is increased, but shadowing effects worsen

Engineering Contradiction:
Improvedeposition areaVSAvoidshadowing
Core Design Contradiction:
Area of stationary objectVSObject-affected harmful factors

Solution Approach 1:

The patent changes the spatial arrangement parameters of spray nozzles by positioning them at specific distances and angles (43-53 degrees) relative to the substrate. This parameter optimization allows maximum deposition area coverage while the inclined angular configuration prevents shadowing, simultaneously achieving both objectives

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If deposition material is sprayed vertically, then simple nozzle arrangement is achieved, but deposition uniformity decreases

Engineering Contradiction:
Improvedeposition uniformityVSAvoidnozzle arrangement
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent modifies the nozzle arrangement by changing the spray angle parameter from vertical (90 degrees) to an inclined range of 43-53 degrees. This parameter change achieves superior deposition uniformity across the substrate while maintaining a relatively simple linear array nozzle configuration, balancing uniformity requirements with structural simplicity

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The controlled deposition apparatus increases the incident angle of the material onto the substrate, reducing the shadow phenomenon, improving deposition uniformity, and increasing the efficiency and resolution of the OLED display manufacturing process.

Implementation Method 1

Existing deposition methods for organic light emitting diode (OLED) displays face challenges with shadow phenomena and non-uniform deposition due to the angle at which deposition materials are sprayed

Methodology Applied
Scientific EffectShadow phenomenon: Shadow

Data Source

PatentEP2719792B1Depositing apparatus and method for manufacturing organic light emitting diode display using the same
Publication Date: 2017.12.27 SAMSUNG DISPLAY CO LTD
  • EP2719792B1 patent drawingFigure 1
  • EP2719792B1 patent drawingFigure 2
  • EP2719792B1 patent drawingFigure 3

AI summary

A deposition apparatus includes a deposition source (100) that receives a deposition material, and a plurality of spray nozzles (110, 112, 114) arranged in a first direction (y) at one side of the deposition source to spray the deposition material through mask (220) to a facing substrate (210). The deposition source includes a center area (102) and outer areas (104a and 104b), the outer areas being at respective ends of the center area with reference to the first direction. The spray nozzles include first spray nozzles (114a and 114b)) arranged in each outer area and extending outwardly from the deposition source, a surface forming an end of the first spray nozzles forming a first inclination angle with a substrate surface in the first direction.