OLED Display 5-Mask Process Merging Pixel Definition and Spacer
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Solution Overview
Problem
Organic light emitting diode display devices require a complex and costly process due to a large number of masks, leading to high production costs and reduced yield.
Innovation Solution
The use of a 5-mask process is optimized by incorporating an inorganic pixel definition layer and an organic spacer, reducing the number of masks needed and integrating them in a single process to form a reliable device, with the pixel definition layer formed using a silicon nitride layer and the spacer using organic materials like BCB, PI, or phenol resin, to minimize damage to electrodes and enhance production efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional multi-mask process is used to manufacture organic light emitting diode display devices, then the device structure can be formed with required precision, but the production cost increases and manufacturing complexity increases
Solution Approach 1:
The patent combines the pixel definition layer and spacer formation into a single integrated layer structure that is patterned using one mask. The pixel definition layer (first inorganic layer) and spacer (second inorganic layer) are formed as separate layers but patterned simultaneously through a single photolithography process, merging two previously separate mask steps into one.
Solution Approach 2:
The single mask pattern serves multiple functions: it defines the pixel regions through the pixel definition layer, creates spacers for planarization and electrical isolation, and establishes the overall device geometry. This multi-functional mask design reduces the total number of masking steps required.
2Manufacturing precision
If more masks are used in the manufacturing process, then the device structure and components can be more precisely defined, but the production cost increases significantly
Solution Approach 1:
The patent merges the pixel definition and spacer formation processes into a single mask step. The pixel definition layer and spacer are formed as separate inorganic layers but are both patterned using the same photolithography mask, combining two costly mask steps into one.
Solution Approach 2:
While using fewer masks, the patent segments the inorganic layer formation into distinct pixel definition layer and spacer layers. This segmentation allows each layer to be optimized for its specific function (pixel definition vs. planarization/isolation) while still being patterned in the same process step.
3Manufacturing precision
If the pixel definition layer and spacer are formed separately with different masks, then each component can be precisely controlled, but the manufacturing process becomes more complex and time-consuming
Solution Approach 1:
The patent combines the patterning of the pixel definition layer and spacer into a single photolithography step. Both inorganic layers are patterned simultaneously using one mask, merging two separate precision operations into one efficient process step.
Solution Approach 2:
The pixel definition layer and spacer are formed as separate inorganic layers deposited in sequence before the final patterning step. This preliminary layer formation allows the subsequent single mask process to pattern both components with high precision without requiring multiple deposition-patterning cycles.
Data Source
AI summary
An organic light emitting diode display device and a method of manufacturing the same are disclosed. The organic light emitting diode display device includes a substrate having an emission section and a non-emission section, a semiconductor layer located on the substrate, a gate dielectric layer located over an entire front surface of the substrate, a gate electrode located in correspondence to the semiconductor layer, a dielectric layer located over the entire front surface of the substrate, source and drain electrodes and a first electrode located on the dielectric layer and electrically connected to the semiconductor layer, a pixel definition layer exposing a part of the first electrode, a spacer located on the pixel definition layer and located on the non-emission section of the substrate, an organic film layer located on the first electrode, and a second electrode located over the entire front surface of the substrate.