Organic Light Emitting Display Double-Layer Gate Insulator
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Solution Overview
Problem
The manufacturing process for organic light emitting displays is complex and costly due to the high number of masking processes required, leading to increased manufacturing time and costs.
Innovation Solution
A method of manufacturing organic light emitting displays with a reduced number of patterning processes using masks, involving a specific sequence of mask processes to form conductive, insulating, and semiconductor layers, with a double-layered gate insulating structure to simplify the process and reduce costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple mask processes are used to form conductive, insulating, and semiconductor layers, then manufacturing precision is improved, but device complexity and manufacturing time increase
Solution Approach 1:
The patent combines multiple patterning operations into a single mask process. Specifically, the gate electrode, pixel electrode, active layer, source/drain electrodes, and pixel-defining layer are all patterned simultaneously using one mask, eliminating the need for separate mask processes for each layer and reducing overall process complexity
Solution Approach 2:
The gate insulating layer is divided into two separate layers (first gate insulating layer and second gate insulating layer) with different dielectric constants. This segmentation allows each layer to serve specific electrical functions while being formed in the same mask process, maintaining patterning precision without increasing process steps
2Manufacturing precision
If multiple mask processes are used to form conductive, insulating, and semiconductor layers, then manufacturing precision is improved, but loss of time increases
Solution Approach 1:
Multiple patterning operations that would traditionally require separate mask processes are merged into a single mask process. The mask simultaneously defines the gate electrode, pixel electrode, active layer, source/drain electrodes, and pixel-defining layer, reducing manufacturing time while maintaining precision through careful process design
Solution Approach 2:
The first gate insulating layer is formed with a higher dielectric constant than the second gate insulating layer, creating a pre-configured electrical field distribution that facilitates subsequent single-step patterning of all electrodes and layers, thereby reducing the time required for multiple sequential patterning operations
3Device complexity
If a single mask process is used to pattern multiple layers, then device complexity is reduced, but manufacturing precision may deteriorate
Solution Approach 1:
Different regions of the structure are assigned different dielectric properties through the two-layer gate insulating structure. The first gate insulating layer (higher dielectric constant) is positioned where stronger electrical field confinement is needed, while the second layer (lower dielectric constant) is positioned where broader field distribution is acceptable, optimizing electrical performance while enabling single-step patterning
Solution Approach 2:
The gate insulating structure uses a composite of two different insulating materials with different dielectric constants. This composite structure provides tailored electrical characteristics that facilitate precise patterning in a single mask process while maintaining electrical performance requirements
Data Source
AI summary
An organic light emitting display and a method of manufacturing the same are disclosed. In one embodiment, the display includes a gate electrode formed over a substrate and an active layer electrically insulated from the gate electrode, wherein the gate electrode is closer to the substrate than the active layer. The display further includes i) a first gate insulating layer and a second gate insulating layer formed between the gate electrode and active layer so as to electrically insulate the active layer from the gate electrode and ii) source and drain electrodes each contacting the active layer.