OLED Fanout Electrode Structure Using Half-Tone Mask Merging
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Solution Overview
Problem
The complex and costly process of manufacturing organic light emitting display devices using multiple masks increases production time and costs, particularly due to the need for intricate mask preparation and multiple photolithography steps.
Innovation Solution
The organic light emitting display device employs a simplified manufacturing method that reduces the number of mask processes by forming conductive layers and electrodes in a sequential manner, using half-tone masks to pattern multiple components simultaneously, and interposing insulation layers to achieve a more efficient and cost-effective production process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple masks are used for pattern transfer, then manufacturing precision is improved, but device complexity and manufacturing cost increase
Solution Approach 1:
The patent combines multiple pattern transfer operations into a single photolithography step by using a multi-layer conductive structure where the gate electrode and source/drain electrodes are formed simultaneously. This merging of operations reduces the number of masks required while maintaining the precision needed for fine pattern transfer, directly addressing the contradiction between precision and process complexity.
Solution Approach 2:
The conductive layers in the patent serve multiple functions: the gate electrode functions as both a control element and a pattern definition element, while the source/drain electrodes are formed in the same photolithography step. This multi-functionality allows a single mask to accomplish what traditionally required multiple masks, reducing process complexity while maintaining manufacturing precision.
2Manufacturing precision
If multiple photolithography processes are used, then pattern accuracy is improved, but manufacturing time is prolonged
Solution Approach 1:
The patent merges multiple photolithography processes into a single step by designing a conductive structure where the gate and source/drain electrodes can be patterned simultaneously. This consolidation maintains the accuracy required for fine patterns while significantly reducing the total manufacturing time by eliminating repeated coating, exposure, and development cycles.
Solution Approach 2:
The patent performs preliminary structuring of the conductive layers before the final photolithography step. By pre-forming the conductive layers with appropriate thicknesses and materials, the subsequent single photolithography process can achieve accurate patterning without requiring multiple sequential steps, thus reducing manufacturing time while preserving pattern accuracy.
3Manufacturing precision
If mask preparation is performed for each pattern, then manufacturing precision is improved, but manufacturing cost increases
Solution Approach 1:
The patent combines the pattern definition function for both gate and source/drain electrodes into a single mask. This merging eliminates the need to prepare and use multiple separate masks, thereby reducing the costs associated with mask fabrication, storage, and handling while maintaining the precision required for accurate pattern transfer.
Solution Approach 2:
The single mask used in the patent serves multiple purposes: it defines the pattern for the gate electrode, the source electrode, and the drain electrode simultaneously. This multi-functionality of the mask reduces the total number of masks required, thereby lowering manufacturing costs while maintaining the precision needed for fine pattern formation.
Data Source
AI summary
An organic light emitting display having an active layer of a thin film transistor formed on a substrate, a first conductive layer formed at an edge of the active layer, a first insulation layer formed on the substrate and the first conductive layer, a second conductive layer corresponding to a central area of the active layer formed on the first insulation layer, a fanout lower electrode separated a predetermined distance from the second conductive layer, a pixel electrode, a third conductive layer formed on the second conductive layer, a fanout upper electrode formed on the fanout lower electrode, a second insulation layer formed on the third conductive layer, the fanout upper electrode, and the pixel electrode, and source and drain electrodes contacting the pixel electrode and formed on the second insulation layer.