OLED Array Substrate Anti-Oxidant Film Segmentation
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Solution Overview
Problem
The production yield of OLED micro-displays is low due to uneven distribution of charge carriers caused by electrode micro-oxidation, leading to uneven luminescence and dark spots in organic light emitting diode arrays.
Innovation Solution
An OLED array substrate is designed with a base substrate, a first electrode pattern, and an insulating layer, where the first electrodes protrude above the insulating layer to form a step, and an anti-oxidant conductive film is applied, disconnected at the step, preventing short-circuiting and improving charge carrier distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If electrode micro-oxidation is performed on silicon wafer, then the OLED devices can be manufactured, but the charge carriers are unevenly distributed causing uneven luminescence and dark spots
Solution Approach 1:
An anti-oxidant conductive film is formed on the first electrode pattern before subsequent processing steps. This preliminary protective action prevents micro-oxidation of the electrode surface, ensuring uniform charge carrier distribution and eliminating dark spots while maintaining manufacturing feasibility
Solution Approach 2:
The anti-oxidant conductive film acts as an intermediary layer between the first electrode pattern and the environment. This intermediate layer prevents direct oxidation of the electrode material, solving the problem of uneven charge carrier distribution without complicating the manufacturing process
2Reliability
If the anti-oxidant conductive film is continuous, then it provides complete protection, but it causes short-circuiting between adjacent first electrodes
Solution Approach 1:
The anti-oxidant conductive film is segmented into discrete portions, with each segment positioned over a individual first electrode. The segmentation is achieved by forming the film before the insulating layer is completely removed, allowing the insulating layer to act as a mask that prevents film formation in the gaps between electrodes. This ensures each electrode is protected independently without short-circuiting
Solution Approach 2:
The anti-oxidant conductive film is applied locally to each first electrode rather than as a continuous layer. The local application ensures that protection is provided exactly where needed (on the electrode surfaces) while avoiding harmful connections between adjacent electrodes, achieving both reliability and electrical isolation
3Manufacturing precision
If additional processing steps like lithography are added to prevent micro-oxidation, then manufacturing precision improves, but manufacturing complexity and costs increase
Solution Approach 1:
The formation of the anti-oxidant conductive film is merged with the existing electrode formation step. By forming the conductive film while the insulating layer is still present, the process utilizes the insulating layer as a built-in mask, eliminating the need for separate lithography steps to pattern the protective film. This combines protection and patterning into a single operation
Solution Approach 2:
The insulating layer serves multiple functions: it acts as a structural support, a separation layer between electrodes, and a masking layer during anti-oxidant film formation. This multi-functionality eliminates the need for additional dedicated masking layers or lithography steps, reducing manufacturing complexity while maintaining precision
Data Source
AI summary
An organic light emitting diode array substrate, a manufacturing method thereof, and a display device are provided. The organic light emitting diode array substrate includes a base substrate; a first electrode pattern and an insulating layer disposed on the base substrate, wherein the first electrode pattern includes a plurality of first electrodes of strip shape, the first electrodes protrude above the insulating layer to form a step therebetween; an anti-oxidant conductive film disposed on the first electrode pattern and the insulating layer, wherein the anti-oxidant conductive film is disconnected at the step between the first electrodes and the insulating layer.


