OLED Gate Wire Taper Angle and Etching Control
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Solution Overview
Problem
As OLED displays increase in size and resolution, they face issues such as signal delay and voltage drop, requiring high-speed driving while being susceptible to damage during manufacturing.
Innovation Solution
The OLED display employs a gate electrode made of a single layer of aluminum or aluminum alloy with a taper angle less than 65°, and a manufacturing method involving sequential dry etching with mixed gases containing chlorine, nitrogen, and boron trichloride or argon to form a gate wire with a thickness less than 3000 Å, preventing defects and enabling high-resolution, high-speed operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the gate wire thickness is increased to reduce resistance and improve signal transmission, then the signal delay is reduced, but the manufacturing precision and etching control become more difficult
Solution Approach 1:
The patent optimizes the gate wire thickness to a specific range (500-3000 Å) and controls the taper angle to be less than 65° to achieve the optimal balance between electrical performance and manufacturability. This parameter optimization allows sufficient signal transmission speed while maintaining etching precision and manufacturing control.
2Speed
If conventional multi-layer gate structures are used to improve electrical performance, then the signal transmission is improved, but the device complexity and manufacturing difficulty increase
Solution Approach 1:
The patent combines multiple functional layers (gate electrode, gate insulation, and protective functions) into a simplified single-layer aluminum or aluminum alloy gate wire structure. This merging reduces the overall device complexity and manufacturing steps while achieving the required electrical performance through optimized material properties and geometric parameters.
Solution Approach 2:
The patent uses aluminum or aluminum alloy material which inherently provides both electrical conductivity and etchability in a single layer, eliminating the need for separate functional layers. This local quality approach simplifies the structure while maintaining performance.
3Productivity
If the taper angle of the gate wire is increased to improve etching efficiency, then the manufacturing productivity is improved, but the manufacturing precision and defect rate worsen
Solution Approach 1:
The patent establishes an optimal taper angle range (less than 65°) that balances etching efficiency with shape control precision. This parameter optimization ensures that the gate wire maintains the required geometric precision while achieving acceptable etching productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution prevents damage during manufacturing and enables high-resolution, high-speed driving of OLED displays by ensuring proper etching selectivity and taper angles, reducing the risk of defects and improving signal transmission speed.
Implementation Method 1
forming a primary gate pattern by primarily dry etching the conductive layer; and forming a secondary gate pattern by secondarily dry etching the primary gate pattern
Implementation Method 2
The primary dry etching and the secondary dry etching use a mixed gas that contains chlorine (Cl2) and nitrogen (N)
Data Source
AI summary
An OLED display according to an exemplary embodiment includes: a substrate; a gate insulation layer that is disposed on the substrate; and a gate wire that is disposed on the gate insulation layer, and includes a gate electrode, wherein the gate wire includes a single layer of aluminum or an aluminum alloy, and an angle formed by side surfaces of the gate wire and the gate insulation layer is less than 65°.