OLED Sub-Pixel Inorganic Overhang Patterning Without Lift-Off

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Solution Overview

Problem

Current OLED pixel patterning processes restrict panel size, pixel resolution, and substrate size, and leave behind organic material particles that disrupt OLED performance.

Innovation Solution

The use of inorganic overhang structures in sub-pixel circuits, combined with evaporation deposition, to form sub-pixels without the need for a lift-off process, ensuring precise deposition of OLED materials and cathodes while maintaining the inorganic overhang structures in place.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If organic encapsulation layers are used, then the fabrication process is simple and low-cost, but the moisture barrier performance is insufficient leading to short device lifetime

Engineering Contradiction:
Improvefabrication process simplicityVSAvoidmoisture barrier performance
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent uses a composite encapsulation structure combining organic encapsulation layers with inorganic barrier layers. The organic layers provide flexibility and step coverage, while the inorganic layers provide superior moisture barrier performance. This composite approach resolves the contradiction by achieving both ease of manufacture and high reliability.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent implements a nested encapsulation structure where inorganic barrier layers are deposited within and between organic encapsulation layers. The inorganic layers are nested within the organic matrix, creating a multi-layered protective structure that combines the advantages of both material types while maintaining fabrication simplicity.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Reliability

If inorganic encapsulation layers are deposited to improve moisture barrier, then device lifetime increases, but fabrication complexity and cost increase

Engineering Contradiction:
Improvedevice lifetimeVSAvoidfabrication process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent segments the encapsulation function into distinct organic and inorganic layers, each performing specific roles. The organic layers handle flexibility and conformal coverage, while the inorganic layers provide the moisture barrier. This segmentation allows for optimized fabrication of each layer type using appropriate techniques, reducing overall complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces organic encapsulation layers as intermediary structures between the inorganic barrier layers. These organic layers serve as mediators that provide mechanical flexibility, stress relief, and conformal coverage, enabling the integration of rigid inorganic barrier layers into the flexible OLED structure without excessive fabrication complexity.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If multiple thin inorganic barrier layers are deposited, then moisture barrier performance improves, but deposition time and production cost increase

Engineering Contradiction:
Improvemoisture barrier performanceVSAvoiddeposition time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent applies preliminary protective action by depositing inorganic barrier layers within the organic encapsulation structure during the fabrication process. This preliminary integration of barrier layers prevents moisture ingress from the beginning, eliminating the need for additional post-fabrication barrier treatments and reducing total process time.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent merges the encapsulation and barrier functions into a single integrated multi-layer structure. By combining organic encapsulation layers with inorganic barrier layers in one fabrication sequence, the patent achieves superior moisture barrier performance without requiring separate deposition processes, thereby reducing total deposition time and production cost.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method increases pixel-per-inch density and improves OLED performance by eliminating particle issues and enhancing throughput.

Implementation Method 1

inorganic encapsulation barrier layers have been developed to overcome the shortcomings of the organic encapsulation layers

Methodology Applied
Scientific EffectPhysical barrier (inorganic layer):

Implementation Method 2

the organic encapsulation layers conformally cover the substrate surfaces and have high flexibility

Methodology Applied
Scientific EffectConformal deposition:

Implementation Method 3

The organic encapsulation layers are formed by a spin-coating process

Methodology Applied
Scientific EffectSpin coating: Spin Coating

Data Source

PatentEP4208905B1Methods of fabricating OLED panel with inorganic pixel encapsulating barrier
Publication Date: 2026.04.29 APPLIED MATERIALS INC
  • EP4208905B1 patent drawingFigure 1A~1B
  • EP4208905B1 patent drawingFigure 1C~1D
  • EP4208905B1 patent drawingFigure 2

AI summary

Embodiments described herein relate to sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic light- emitting diode (OLED) display. The device includes a plurality of sub-pixels, each sub-pixel of the plurality of sub-pixels defined by adjacent pixel-defining layer (PDL) structures with inorganic overhang structures disposed on the PDL structures, each sub-pixel having an anode, organic light-emitting diode (OLED) material disposed on the anode, and a cathode disposed on the OLED material. The device is made by a process including the steps of: depositing the OLED material and the cathode by evaporation deposition, and depositing an encapsulation layer disposed over the cathode.