OLED Partition Protrusion Measurement Using Oblique Electron Beams
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Solution Overview
Problem
The manufacturing process of display devices with organic light-emitting diodes (OLEDs) faces challenges in maintaining reliability due to the inappropriate measurement of the protrusion amount of partitions, which affects the division and electric connection of organic layers and electrodes, leading to inconsistent display performance.
Innovation Solution
A measuring method that involves forming a partition with a lower and upper portion, acquiring a secondary electron image using an electron beam inclined from a perpendicular direction, and analyzing the image to measure the protrusion amount between the side surface and end portion of the partition, ensuring accurate measurement and reliability in the manufacturing process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If an electron beam is emitted from a perpendicular direction to measure partition protrusion, then the measurement process is simple, but the measurement precision is insufficient due to inability to capture side surface geometry
Solution Approach 1:
The patent changes the observation dimension by emitting the electron beam from an oblique direction (inclined at a specific angle) rather than perpendicularly. This dimensional change in beam incidence allows the secondary electron detector to capture both the top surface and side surface of the partition simultaneously, enabling accurate measurement of the protrusion amount while maintaining a relatively simple measurement process
2Productivity
If the partition protrusion amount is not accurately measured and controlled, then the manufacturing process is faster, but the reliability of the display device deteriorates due to improper organic layer division and electric connection
Solution Approach 1:
The patent replaces complex mechanical measurement systems with a secondary electron detection method using an electron beam. This substitution enables non-contact, high-precision measurement of the partition protrusion amount, ensuring proper organic layer division and electric connection while maintaining manufacturing efficiency through automated inspection
Solution Approach 2:
The patent changes the measurement parameter by using secondary electron detection at an oblique angle to directly measure the protrusion amount. This parameter change enables accurate quality control of the partition structure, ensuring that the protrusion amount is within the specified range (0.1-10 μm) to guarantee proper organic layer division and electric connection
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method allows for precise measurement of the partition protrusion, enhancing the reliability of the display device by ensuring proper division of organic layers and electric connections, thus improving the overall performance and consistency of the OLED display.
Implementation Method 1
acquiring a first image generated by detecting a secondary electron generated by emitting an electron beam including a primary electron to an area including at least a part of the side surface of the lower portion and at least a part of an end portion of the upper portion
Data Source
AI summary
According to one embodiment, a measuring method includes forming a partition including a lower portion arranged on a base and an upper portion protruding from a side surface of the lower portion, acquiring a first image generated by detecting a secondary electron generated by emitting an electron beam including a primary electron to an area including at least a part of the side surface of the lower portion and at least a part of an end portion of the upper portion, analyzing the first image, and measuring an amount of protrusion by which the end portion of the upper portion protrudes from the side surface of the lower portion, based on the analysis result.