OLED Pixel Electrode Multi-Layer Structure for Etching Damage Prevention
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Solution Overview
Problem
The manufacturing process of organic light emitting display apparatuses often damages the pixel electrode due to etching solutions penetrating through pin holes in the electrode layer, causing structural integrity issues.
Innovation Solution
A multi-layered pixel electrode structure is implemented, including a transparent conductive material layer, a metal layer, and protective layers to prevent etching solution penetration, along with a specific etching process using different solutions to expose and protect the electrode layers, ensuring the structural integrity of the pixel electrode.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If a transparent conductive material layer with pin holes is used in the pixel electrode to increase optical efficiency, then optical efficiency is improved, but the electrode layer becomes vulnerable to etching solution penetration causing damage
Solution Approach 1:
The pixel electrode is divided into multiple layers: a first electrode layer with pin holes for optical efficiency, and a fourth electrode layer without pin holes for protection. This segmentation allows each layer to fulfill its specific function independently, resolving the contradiction between optical efficiency and structural integrity
Solution Approach 2:
The fourth electrode layer acts as an intermediary protective barrier between the etching solution and the third electrode layer. It prevents etching solution penetration through pin holes while allowing the pin-holed third electrode layer to maintain optical efficiency
2Manufacturing precision
If multiple etching solutions are used to form patterns by etching the pixel electrode, then manufacturing precision is improved, but the risk of etching solution penetrating pin holes and damaging the electrode increases
Solution Approach 1:
The fourth protective electrode layer is formed in advance before the etching process. This preliminary protective structure prevents etching solution from reaching and damaging the third electrode layer during the etching of the fifth electrode layer, enabling precise pattern formation without damage risk
Solution Approach 2:
The fourth electrode layer, which might seem to add complexity, actually converts the harmful effect of etching solution penetration into a protected process. It allows the use of multiple etching solutions for precise patterning while preventing damage, turning a potential harm into a safe manufacturing process
Data Source
AI summary
An organic light emitting display apparatus comprises an active layer, a gate electrode, a pixel electrode, source and drain electrodes, an intermediate layer, and an opposite electrode. The gate electrode includes: a first insulating layer; first, second and third conductive layers; a fourth conductive layer protecting the third conductive layer; and a fifth conductive layer. The pixel electrode includes a first electrode layer formed on the first insulating layer, a second and a third electrode layer, a fourth electrode layer protecting the third electrode layer, and a fifth electrode layer. A second insulating layer is disposed between the source and drain electrodes. The intermediate layer is disposed between the opposite electrode and the pixel electrode, and prevents damage to the pixel electrode during the manufacturing process.