On-Chip Shielding Structure with Feed-Through Capacitors
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Solution Overview
Problem
Current electromagnetic shielding technologies for semiconductor substrates are inadequate in protecting against RF interference, particularly in high-frequency applications, as they lack effective feed-through connections and are incomplete due to holes for display and operation buttons, leading to significant radiation leakage and increased interference.
Innovation Solution
A conductive shielding structure surrounding the circuit on a semiconductor substrate, incorporating a high doping bottom layer, via sidewalls, and feed-through capacitors or transmission lines to provide power and signal connections, forming a complete shielding box that effectively blocks electromagnetic interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional shielding structures are used without feed-through capacitors or transmission lines, then the shielding structure is simpler and easier to manufacture, but the shielding effectiveness is degraded due to radiation leakage through connection openings
Solution Approach 1:
Feed-through capacitors and transmission lines are introduced as intermediary components that mediate between the shielding structure and external connections. These intermediaries provide controlled electromagnetic pathways that maintain shielding effectiveness while enabling necessary power and signal connections through the shielding barrier.
Solution Approach 2:
The shielding structure implements different properties in different regions: the main shielding body uses high-doping silicon for electromagnetic blocking, while connection regions use feed-through capacitors and transmission lines with specific electromagnetic characteristics. This local differentiation allows the structure to simultaneously achieve shielding effectiveness and functional connectivity.
2Adaptability or versatility
If holes are provided for display and operation buttons in the shielding structure, then the device functionality is enabled, but the shielding becomes incomplete and radiation leakage increases
Solution Approach 1:
Feed-through capacitors serve as intermediary components at the connection openings where buttons are located. These intermediaries provide controlled electromagnetic pathways that maintain shielding effectiveness while enabling necessary power and signal connections through the shielding barrier at button locations.
Solution Approach 2:
The shielding structure utilizes parameter changes in the feed-through capacitors, such as capacitance values and frequency characteristics, to control electromagnetic signal transmission. By carefully selecting these parameters, the structure allows necessary signals to pass while blocking unwanted radiation, maintaining both functionality and shielding completeness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed solution significantly improves isolation by 2-30 dB across various frequency ranges, effectively reducing coupling between circuit blocks and enhancing shielding effectiveness, even in high-frequency applications.
Implementation Method 1
incorporating a high doping bottom layer
Implementation Method 2
A conductive shielding structure surrounding the circuit on a semiconductor substrate... effectively blocks electromagnetic interference
Data Source
AI summary
A design structure is embodied in a machine readable medium for designing, manufacturing, or testing an integrated circuit. The design structure comprises: a conductive structure surrounding and accommodating a circuit or a circuit device arranged on a substrate and at least one feed through capacitor and one transmission line associated with the conductive structure and providing the power supply and signals to the circuit or circuit device respectively. The design structure also comprises a shielding structure surrounding a circuit or a circuit device arranged on a substrate and at least one feed through capacitor or a transmission line arranged on a side of the shielding structure.