Optical Element Bonding With Calibrated Adhesive Gap Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The precise setting of the adhesive gap in microlithography is challenging due to manufacturing-dictated geometry deviations, viscosity fluctuations, and gravitational influences, which can introduce mechanical stresses and deformations into optical components, particularly in EUV and DUV systems.
Innovation Solution
A method involving a positioning device to calibrate relative positions of components before applying adhesive, using sensors and mechanical stops to achieve a precise adhesive gap without mechanical stress, by calibrating positions before and after applying adhesive, and adjusting the actuator's position to the optical element.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If adhesive is applied directly to components with curved joining surfaces, then the adhesive bond can be formed, but the adhesive gap cannot be precisely controlled due to geometry deviations, viscosity fluctuations, and gravitational influences
Solution Approach 1:
The patent applies preliminary action by calibrating the positioning device before adhesive application. The method includes calibrating a first relative position with a first distance value defining a predefined adhesive gap, and calibrating a second relative position with a second distance value greater than the first value, both before applying adhesive. This preliminary calibration establishes precise reference positions that compensate for subsequent manufacturing variations and environmental influences during the bonding process.
Solution Approach 2:
The patent introduces an intermediary calibration system between the components and the adhesive application process. The positioning device with calibrated reference positions acts as an intermediary that mediates the relationship between the curved joining surfaces and the adhesive gap control, allowing precise gap setting despite surface geometry deviations and adhesive viscosity fluctuations.
2Manufacturing precision
If components are positioned precisely to achieve the desired adhesive gap, then bonding accuracy is improved, but mechanical stresses and deformations may be introduced into the actuators or optical elements
Solution Approach 1:
The patent performs preliminary calibration of both the first relative position (defining the target adhesive gap) and the second relative position (providing a reference for adhesive application) before adhesive application. This allows the components to be positioned precisely for accurate gap control while the adhesive is applied at a safer distance, preventing mechanical stress and deformation during the critical positioning phase.
Solution Approach 2:
The patent segments the positioning process into distinct calibrated positions: a first relative position defining the target adhesive gap, and a second relative position for adhesive application. This segmentation allows the system to achieve precise gap control at the first position while maintaining component safety by applying adhesive at the separated second position, thereby avoiding mechanical stress and deformation.
3Measurement precision
If the adhesive gap is set too small to achieve high precision, then measurement accuracy is improved, but the reliability of the adhesive bond decreases due to manufacturing variations and environmental influences
Solution Approach 1:
The patent applies preliminary action by establishing calibrated reference positions before adhesive application. The first relative position is calibrated to define a predefined adhesive gap with high measurement accuracy, while the second relative position is calibrated at a greater distance to provide a safe position for adhesive application. This preliminary calibration ensures that the precise gap setting is maintained despite manufacturing variations and environmental influences, while the separated adhesive application position protects bond reliability.
Solution Approach 2:
The patent segments the positioning into two distinct calibrated states: a first relative position for precise gap measurement and definition, and a second relative position at a greater distance for adhesive application. This segmentation enables the system to achieve high measurement precision for the adhesive gap while maintaining reliability by applying adhesive from a position that avoids mechanical stress and accounts for manufacturing tolerances.
Data Source
AI summary
Method and device for producing an adhesive bond between a first component and a second component (optical element) for microlithography. The method involves: introducing the first and second components into a positioning device for changing the relative position between the first and second components, calibrating a first relative position, in which a distance between the first and second components has a first value defining a predefined adhesive gap, calibrating a second relative position, in which a distance between the first and second components has a second value greater than the first value, applying adhesive to the first component while the first and second components are at a distance greater than the first value, and setting the first relative position while forming the adhesive bond between the first and second components. Calibrating the first and second relative positions are carried out before the adhesive is applied to the first component.