Integrated Optical and Condensation Particle Counter for Nano-Scale Detection
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Solution Overview
Problem
Current particle detection technologies, such as optical particle counters and scanning mobility particle sizers, are inadequate for detecting nano-scale particles in semiconductor manufacturing, as they either have limited detection efficiency or struggle to accurately measure particles in the nano-scale range.
Innovation Solution
A particle counting method and device that combines an optical particle counter and a condensation particle counter in a serial or parallel configuration, allowing for the integration of different particle size detection ranges to effectively measure and analyze nano-sized particles, with the optical counter covering a range of 0.1 μm to 10 μm and the condensation counter extending to 2.5 nm to 3 μm, enhancing detection efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an optical particle counter is used to detect particles, then the device can measure particle size in the micro-scale range, but it cannot effectively detect nano-scale particles
Solution Approach 1:
The detection range is segmented into two parts: micro-scale particles are detected by an optical particle counter, while nano-scale particles are detected by a condensation particle counter. This segmentation allows each counter to operate within its optimal detection range, resolving the contradiction between measurement precision for micro-particles and adaptability for nano-particles.
Solution Approach 2:
The system achieves multi-functionality by combining two types of particle counters with different detection capabilities. The optical particle counter handles micro-scale detection while the condensation particle counter handles nano-scale detection, making the overall system universally applicable across different particle size ranges.
2Measurement precision
If a scanning mobility particle sizer is used to detect nano-scale particles, then the device can measure nano-scale particles, but the detection efficiency is low due to the differential mobility analyzer having only 5% efficiency
Solution Approach 1:
The invention extracts the low-efficiency differential mobility analyzer component from the scanning mobility particle sizer and replaces it with a condensation particle counter. This extraction eliminates the bottleneck of 5% detection efficiency while preserving the nano-scale particle detection capability, thereby improving overall productivity.
Solution Approach 2:
The system changes the detection parameter approach by using condensation particle counting instead of differential mobility analysis. This parameter change enables direct detection of nano-scale particles with much higher efficiency, transforming the low-efficiency measurement process into a high-efficiency one.
3Adaptability or versatility
If multiple particle counters with different detection ranges are integrated, then the particle size detection range is extended, but the device complexity increases
Solution Approach 1:
The invention merges an optical particle counter and a condensation particle counter into a single integrated system. By combining these two counters with complementary detection ranges, the system achieves extended particle size detection capability while managing complexity through unified hardware and software architecture.
Solution Approach 2:
The integrated system provides multi-functionality by enabling detection across both micro-scale and nano-scale particle ranges through a single device. This universal capability eliminates the need for multiple separate counters, thereby extending detection range while actually reducing overall system complexity.
Data Source
AI summary
A particle counting method comprises obtaining first particle information related to the gas to be measured by a first particle counter with a first particle size detection range, obtaining second particle information related to the gas to be measured by a second particle counter with a second particle size detection range, and generating particle size distribution information according to the first and second particle information. The first particle information includes a plurality of particle size ranges and a plurality of particle quantities wherein each of the plurality of particle size ranges corresponds to a respective one of the plurality of particle quantities, the second particle information includes the quantity of particles of which the size values are in the second particle size range, and the lower limit of the second particle size range is lower than that of the first particle size range.