Optically Controlled ESDP Materials for IC Protection

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Solution Overview

Problem

Conventional electrostatic discharge protection (ESDP) methods for integrated circuits (ICs) face challenges as IC devices shrink, with on-die diodes occupying valuable space, inducing capacitive loading, and consuming power, and being unsuitable for silicon-on-insulator or thinned substrate devices.

Innovation Solution

The implementation of optically controllable materials (OCMs) that change electrical resistance in response to optical radiation, allowing for reversible electrical shorts between signal and ground pathways, providing effective ESDP without occupying on-die real estate and maintaining high-frequency performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional on-die diodes are used for electrostatic discharge protection, then ESDP function is provided, but valuable on-die space is occupied and capacitive loading is induced

Engineering Contradiction:
Improveelectrostatic discharge protectionVSAvoidon-die space
Core Design Contradiction:
ReliabilityVSArea of moving object

Solution Approach 1:

A transfer layer made of optically controllable material is introduced as an intermediary between the conductive layer and the second substrate. This transfer layer acts as a mediator that provides ESDP functionality through optical control, eliminating the need for conventional on-die diodes and their associated space requirements.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces the electrical/mechanical ESDP mechanism (conventional diodes) with an optically controlled system. The optically controllable material in the transfer layer switches between conductive and insulating states via optical radiation, substituting traditional electrical ESDP components with an optical control mechanism.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Reliability

If conventional on-die diodes are used for electrostatic discharge protection, then ESDP function is provided, but power consumption increases due to capacitive loading

Engineering Contradiction:
Improveelectrostatic discharge protectionVSAvoidpower consumption
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The patent replaces the electrical ESDP mechanism (conventional diodes that cause capacitive loading) with an optically controlled system. The optically controllable material switches states via optical radiation rather than electrical biasing, eliminating the continuous power consumption associated with maintaining diode bias voltages and reducing capacitive loading effects.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the control parameter for ESDP from electrical voltage (conventional diodes) to optical radiation. This parameter change allows the ESDP function to be activated on-demand through optical signals rather than requiring continuous electrical power to maintain the protective state, thereby reducing power consumption.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If conventional on-die diodes are used for electrostatic discharge protection, then ESDP function is provided, but compatibility with silicon-on-insulator and thinned substrate devices is lost

Engineering Contradiction:
Improveelectrostatic discharge protectionVSAvoidcompatibility with different substrate types
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The transfer layer with optically controllable material provides universal ESDP functionality that works across different substrate types including silicon-on-insulator and thinned substrate devices. The optical control mechanism is substrate-agnostic, making the ESDP solution adaptable to various device architectures where conventional diodes would be incompatible.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The transfer layer acts as an intermediary that decouples the ESDP function from substrate-specific constraints. By placing the optically controllable material in the transfer layer rather than directly on the die, the solution becomes compatible with different substrate types including SOI and thinned substrates, as the ESDP mechanism operates independently of the substrate structure.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively protects ICs from electrostatic discharge without the drawbacks of conventional diodes, offering customizable protection at various structural levels and enabling normal operation by switching between high and low resistance states based on illumination.

Implementation Method 1

a material in contact with the first conductive structure and the second conductive structure, wherein the material has a first electrical conductivity before illumination of the material with optical radiation and a second electrical conductivity, different from the first electrical conductivity, after illumination of the material with optical radiation

Methodology Applied
Scientific EffectPhotoconductivity: Photoconductivity

Data Source

PatentUS11289431B2Electrostatic discharge protection in integrated circuits using materials with optically controlled electrical conductivity
Publication Date: 2022.03.29 INTEL CORP
  • US11289431B2 patent drawing
  • US11289431B2 patent drawing
  • US11289431B2 patent drawing

AI summary

Disclosed herein are structures, devices, and methods for electrostatic discharge protection (ESDP) in integrated circuits (ICs). In some embodiments, an IC component may include: a first conductive structure; a second conductive structure; and a material in contact with the first conductive structure and the second conductive structure, wherein the material has a first electrical conductivity before illumination of the material with optical radiation and a second electrical conductivity, different from the first electrical conductivity, after illumination of the material with optical radiation.