Optical Fiber Coupling Structure With Sloped Silicon Mirror

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Solution Overview

Problem

Existing technologies face challenges in improving the integration and efficiency of optical and electrical signal transmission and processing, particularly in devices combining long-range optical components with short-range electrical components, necessitating advancements in optical fiber coupling structures for enhanced signal conversion and processing.

Innovation Solution

The development of fiber coupling structures utilizing reflective silicon surfaces formed through semiconductor processing, which include low-roughness and high-angle precision mirrors, coupled with optical fibers or waveguides, to facilitate efficient optical signal redirection and alignment, using techniques such as anisotropic etching and deposition of reflection layers.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional optical fiber coupling structures are used, then device integration is achieved, but optical coupling efficiency and alignment precision are insufficient

Engineering Contradiction:
Improveoptical coupling efficiencyVSAvoidalignment precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

A reflective silicon surface is introduced as an intermediary component between the optical fiber and the photonic component. This mirror structure acts as a mediator that redirects optical signals with high precision, enabling efficient coupling without requiring direct precise alignment between the fiber and component, thus resolving the contradiction between coupling efficiency and alignment precision

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces complex mechanical alignment systems with a reflective silicon surface that uses optical reflection principles. Instead of mechanically adjusting fiber positions to achieve precise alignment, the system uses the law of reflection to redirect light paths, substituting mechanical precision requirements with optical geometric precision, thereby improving both coupling efficiency and alignment precision

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Productivity

If reflective silicon surfaces with high angle precision are fabricated, then optical signal redirection efficiency is improved, but manufacturing complexity increases

Engineering Contradiction:
Improvesignal redirection efficiencyVSAvoidmanufacturing complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent utilizes anisotropic etching to create reflective silicon surfaces with specific geometric parameters (angles and slopes) that optimize optical reflection. By controlling etching parameters such as etch depth, etch rate, and surface orientation, the system achieves high-angle-precision mirrors without requiring complex multi-step manufacturing processes, thus improving signal redirection efficiency while managing manufacturing complexity through parameter optimization rather than process complexity

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed solution enhances optical coupling efficiency and reliability, improving system transmission speed and alignment between photonic components and optical fibers, thereby supporting more effective signal transmission and processing.

Implementation Method 1

The fiber coupling structure may include a reflective surface that redirects optical signals

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

a lens structure that includes a lens

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS20250306300A1Optical fiber coupling structure for photonic package
Publication Date: 2025.10.02 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250306300A1 patent drawing
  • US20250306300A1 patent drawing
  • US20250306300A1 patent drawing

AI summary

A structure includes an upper silicon structure that includes a recess in a first side of the upper silicon structure, wherein the recess has a sloped sidewall; a lower silicon structure that includes a lens recessed in a first side of the lower silicon structure, wherein the first side of the upper silicon structure is bonded to the first side of the lower silicon structure, wherein the sloped sidewall of the upper silicon structure is vertically aligned with the lens of the lower silicon structure; and a waveguide structure within the recess, wherein the waveguide structure is optically coupled to the lens by the sloped sidewall.