Optical Inspection System with Dual Support for Pollutant Detection
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Solution Overview
Problem
Conventional optical inspection systems for flat panel display devices face challenges in accurately detecting pollutants due to noise caused by light scattering from the substrate supporting structure, which deteriorates image quality and inspection reliability, especially when dealing with small nano-sized particles.
Innovation Solution
The optical inspection system employs a dual supporting structure with a first material of high transmittance and a second material of high reflectance, along with a controlled s-polarized laser beam and a refraction plate to minimize noise from unwanted scattered light, allowing for precise detection of pollutants by optimizing the incidence angle and reducing noise factors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a laser beam is used for optical inspection of pollutants on a display substrate, then the inspection process can detect defects, but the laser beam may penetrate through the substrate and be scattered by the substrate supporting structure, causing noise that deteriorates image quality and inspection reliability
Solution Approach 1:
A light absorbing member is introduced as an intermediary component between the display substrate and the substrate supporting structure. This mediator absorbs the laser beam that penetrates through the substrate, preventing it from being scattered by the supporting structure. The light absorbing member effectively blocks the harmful scattered light while allowing the inspection process to continue, thereby reducing noise and improving inspection reliability
Solution Approach 2:
The harmful scattered light is extracted or removed from the optical path by using the light absorbing member to selectively absorb the laser beam that has passed through the substrate. This extraction of the harmful component (scattered light) separates it from the useful signal (light scattered by pollutants), thereby improving the signal-to-noise ratio and detection accuracy
2Object-affected harmful factors
If a thin film is coated on the display substrate to reduce optical transmittance, then some light scattering is reduced, but it is difficult to completely prevent the laser beam from passing through and being scattered by the substrate supporting structure
Solution Approach 1:
Instead of uniformly modifying the entire substrate with a thin film, the light absorbing member is strategically positioned only in the specific region where the substrate supporting structure is located. This local application of light absorption property targets the specific source of scattered light without affecting the overall optical characteristics of the substrate, providing a more effective and efficient solution
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the reliability and precision of pollutant detection by minimizing noise from unwanted scattered light, enabling the accurate identification of nano-sized particles and improving overall inspection quality.
Implementation Method 1
a light absorbing member configured to absorb the laser beam which has passed through the display substrate
Implementation Method 2
a light condensing unit collecting scattered light that is scattered at the target object when the laser beam is irradiated onto the target object
Implementation Method 3
the light source unit may further include a refraction plate, allowing for a change in irradiation position of the laser beam
Data Source
AI summary
Provided is an optical inspection system including a supporting unit, allowing a target object to be loaded thereon, a light source unit configured to emit a laser beam toward the target object, a light condensing unit collecting scattered light that is scattered at the target object when the laser beam is irradiated onto the target object, and a control unit controlling the light source unit and the light condensing unit and analyzing the scattered light to examine whether there are pollutants on the target object. The supporting unit may include a first supporting unit, on which the target object is disposed, and which is formed of a first material, and a second supporting unit, which is disposed under the first supporting unit and is formed of a second material different from the first material.