Optical Inspection Light Direction Distribution Analysis

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Solution Overview

Problem

Existing optical inspection methods struggle to accurately acquire information from object surfaces when light is scattered, diffused, or diffracted in various directions, as they fail to effectively distinguish and analyze the direction distribution of light components.

Innovation Solution

The method involves using an optical inspection apparatus with a wavelength selection portion that passes light components of different wavelength spectra and an imaging portion with color channels to capture these components as signal vectors, estimating the spread of light direction distribution based on the directions of these vectors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional optical inspection methods are used to capture light from object surfaces, then the inspection process is simple, but the ability to accurately distinguish and analyze light direction distribution when light is scattered or diffused deteriorates

Engineering Contradiction:
Improvelight direction distribution identification accuracyVSAvoidoptical inspection system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent segments the optical inspection system into distinct functional modules: a wavelength selection portion that separates light into multiple wavelength bands, and an imaging portion with multiple color channels that captures directional information for each wavelength. This segmentation allows independent optimization of each module to achieve accurate light direction distribution analysis while maintaining manageable system complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent adds wavelength as an additional dimension to the optical inspection system. By incorporating multiple wavelength selection regions and corresponding color channels, the system transforms a two-dimensional spatial capture problem into a three-dimensional analysis that includes wavelength spectrum, enabling accurate distinction of light direction distribution that conventional single-wavelength methods cannot achieve.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If multiple wavelength spectra are captured to analyze light direction distribution, then the inspection accuracy improves, but the data processing complexity increases

Engineering Contradiction:
Improvesurface property identification accuracyVSAvoiddata processing complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent segments the optical signal into multiple wavelength bands with distinct spectral characteristics. Each wavelength band provides complementary information about the object surface, and the segmentation allows systematic processing of each band independently before integration, reducing the overall data processing complexity while maintaining high inspection accuracy.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent utilizes changes in light wavelength parameters to extract different types of surface information. By capturing and analyzing multiple wavelength spectra, the system obtains enhanced contrast and directional information that varies with wavelength, enabling more accurate surface property identification through multi-parameter analysis rather than single-parameter measurement.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables accurate identification of the spread of light direction distribution and surface properties even when light is scattered or diffused, allowing for precise inspection of object surfaces with minute defects.

Implementation Method 1

a wavelength selection portion configured to selectively pass light components including light components of at least two different wavelength spectra from the object point

Methodology Applied
Scientific EffectSpectral separation: Dispersion (of waves)

Implementation Method 2

an imaging portion including a plurality of color channels configured to receive the light components of the wavelength spectra

Methodology Applied
Scientific EffectPhotoelectric conversion: Photoelectric Effect

Data Source

PatentUS20240319078A1Optical inspection method, non-transitory storage medium, and optical inspection apparatus
Publication Date: 2024.09.26 KK TOSHIBA
  • US20240319078A1 patent drawing
  • US20240319078A1 patent drawing
  • US20240319078A1 patent drawing

AI summary

According to an embodiment, an optical inspection method includes: causing a wavelength selection portion to selectively pass light components including at least two different wavelength spectra from an object point and causing an imaging portion including at least two color channels configured to receive the light components of the wavelength spectra to capture the object point; defining the light components of the at least two different wavelength spectra as signal vectors having different directions based on light reception data in the at least two color channels for the object point; and estimating spread of a direction distribution of light at the object point based on the directions of the signal vectors.