Optical Interference Measurement System Synchronous Platform Alignment
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Solution Overview
Problem
Conventional interferometers face challenges in achieving high coordination accuracy between the movement of the interferometer and the test sample, leading to reduced measurement accuracy due to misalignment of reflected light during the measurement process.
Innovation Solution
A measurement system that includes a light source, a light guiding element with a beam splitter and reflector, and a detection platform, where the test sample and reference sample are fixed and move synchronously, ensuring that the measurement light and reference light maintain aligned positions, allowing for precise optical interference and improved accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the interferometer and test sample move during measurement, then the measurement process can be completed, but the coordination accuracy between their movements is low, causing misalignment of reflected light and reducing measurement accuracy
Solution Approach 1:
The patent combines the test sample and reference sample onto a single movable platform. This merging ensures that both samples move together with identical motion, eliminating coordination errors between separate movement systems. The platform integrates multiple sample holders and maintains fixed relative positions between samples, directly resolving the misalignment issue caused by independent movements of interferometer and test sample.
Solution Approach 2:
The patent uses a reference sample that replicates the optical characteristics of the test sample. By measuring the reference sample under identical movement conditions and comparing it with the test sample measurement, the system compensates for movement-induced errors. The reference sample acts as a copy that experiences the same coordination inaccuracies, allowing error cancellation through differential measurement.
2Ease of operation
If the test sample moves with the interferometer, then the measurement can be performed, but the reflected light becomes misaligned at specific positions on the test sample
Solution Approach 1:
The patent combines the test sample and reference sample onto a single movable platform. This merging ensures that both samples move together with identical motion, eliminating coordination errors between separate movement systems. The platform integrates multiple sample holders and maintains fixed relative positions between samples, directly resolving the misalignment issue caused by independent movements of interferometer and test sample.
Solution Approach 2:
Instead of moving the interferometer to track the test sample, the patent inverts the approach by moving both samples together on a platform while keeping the interferometer stationary. This reversal of the movement paradigm eliminates the need for coordination between interferometer and sample movements, as both samples experience identical motion throughout the measurement process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances measurement accuracy by maintaining the relative positions of the test and reference samples unchanged, synchronizing any shifts in the spot positions, thus minimizing errors in the interference image and ensuring consistent optical characteristic measurements.
Implementation Method 1
a beam splitter 121 and a reflector 122. The beam splitter 121 is arranged on an optical path of the source light L1 and is configured to receive the source light L1 and divide the source light L1 into the measurement light L2 and the reference light L3
Implementation Method 2
The reflector 122 is arranged on an optical path of the measurement light L2 and is configured to guide the measurement light L2 to the test sample 20
Implementation Method 3
The measurement light L2 reflected by the test sample 20 and the reference light L3 reflected by the reference sample 30 are emitted from the same light source 11, so the measurement light L2 and the reference light L3 have a same frequency, a same vibration direction, and a constant phase difference. That is, the interference condition is satisfied, and the measurement light L2 and the reference light L3 are combined at the beam splitter 121 and interfere with each other to form an interference light L4
Implementation Method 4
The focusing lens 15 is arranged between the beam splitter 121 and the detector 13. The focusing lens 15 is used to accurately focus the interference light L4 to the detector 13
Data Source
AI summary
A measurement system includes a light source configured to emitting a source light, a detection platform configured to support a reference sample and a test sample; a light guiding element on an optical path of the source light; and a detector. The detection platform is configured to synchronously move the reference sample and the test sample on a same surface of the detection platform. The light guiding element is configured to divide the source light into a measurement light and a reference light and guide the measurement light to the test sample, and the reference light to the reference sample. The measurement light reflected by the test sample and the reference light reflected by the reference sample are combined as an interference light. The detector is configured to receive the interference light and obtain optical information of the test sample according to the interference light.