Optical Path Deviation for Scanner Testing
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Solution Overview
Problem
Current semiconductor fabrication processes require precise monitoring and automated defect classification, but existing examination tools lack efficient methods for testing and maintaining optical devices, leading to reduced availability and increased costs due to prolonged testing times and lack of precise failure location feedback.
Innovation Solution
A system and method utilizing a processor and memory circuitry (PMC) to control optical elements in a scanner, allowing image data acquisition by imaging sensors during testing of optical devices, enabling precise operability assessment and prediction of device life cycles, while maintaining constant optical parameters and providing pinpointed feedback on device failures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional testing methods are used for optical devices in examination tools, then comprehensive testing can be performed, but testing time is prolonged and tool availability is reduced
Solution Approach 1:
The patent extracts the optical path from the specimen examination route and redirects it to a dedicated test sensor. By separating the testing function from the normal examination function, the system can test optical devices without affecting specimen processing, thereby reducing testing time while maintaining testing completeness.
Solution Approach 2:
The optical path is designed to serve dual purposes: it can be used for examining specimens during normal operation and for testing optical devices when needed. The system automatically switches between these functions, making the examination tool multi-functional and eliminating the need for separate testing equipment.
2Reliability
If traditional testing methods are used for optical devices, then testing can be conducted, but precise failure location feedback is not provided
Solution Approach 1:
The patent implements a feedback mechanism where the test sensor captures images of the optical path and the processor analyzes these images to determine the operational status of optical devices. This provides precise failure location feedback by identifying which specific optical component is malfunctioning based on the captured test images.
3Reliability
If optical devices are tested using external equipment, then testing can be performed, but testing costs and system complexity increase
Solution Approach 1:
The patent merges the testing function with the existing examination tool by integrating a test sensor and processor into the same system. The optical path serves both examination and testing purposes, eliminating the need for separate external testing equipment and reducing overall system complexity while maintaining testing accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution reduces testing time and costs, increases tool availability, provides precise failure location feedback, and predicts the life cycle of optical devices, thereby enhancing the efficiency and reliability of semiconductor fabrication processes.
Implementation Method 1
at least one optical element optically connected to the first optical device and capable to deviate an optical path of light transmitted by the first optical device
Implementation Method 2
at least one imaging sensor... enabling acquiring, by the at least one imaging sensor, image data informative of the first optical device
Data Source
AI summary
There is provided a system and a method of testing an optical device in a scanner for scanning a semiconductor specimen, the method comprising controlling, by a processor and memory circuitry (PMC) operatively connected to the scanner, an optical element optically connected to the optical device to deviate an optical path of light transmitted by the optical device so to transmit towards an imaging sensor, thereby enabling acquiring, by the imaging sensor, image data informative of the optical device, wherein in a scanning mode the optical element enables light transmitting from the optical device towards another optical device comprised in the scanner, and processing the acquired image data to obtain results informative of operability of the optical device.