Contactless Testing TRIZ Cases
- MOS Transistor Failure Detection via Recess Profile Analysis
Recess profiling after controlled wet etching reveals MOS transistor failure more accurately by protecting the substrate from profile distortion.
- 2D Nanoantenna Photodetector for LWIR Polarization Sensing
Resonant nanoantennas add anisotropy to a 2D photodetector, enabling on-chip LWIR spectral and polarization sensing without bulky spectrometers.
- Metal Via Test Structure for Early Open-Circuit Detection
An added contact layer enables E-beam inspection of metal via filling, exposing open circuits early and reducing semiconductor process losses.
- Antenna Test Fixture Layout for Interference-Free IC Testing
Grouped antennas and shielding via arrays cut interference in dense IC test fixtures, preserving signal integrity during sequential testing.
- Frontside SEM Fault Isolation for SPR Semiconductor Inspection
Frontside SEM e-beam probing with ATE bypasses blocked backside access in SPR chips, enabling dynamic fault isolation and process revision.
- Electron Beam NCEM Alignment on a Moving Wafer Stage
Real-time stage position feedback steers the electron beam during non-contact wafer testing, improving alignment accuracy and throughput.
- Moving-Stage Electron Beam Alignment for Non-Contact Electrical Measurement
Continuous stage motion can disrupt wafer targeting; position feedback adjusts electron-beam deflection for accurate NCEM.
- THz FET Plasmonic Detection for Unbiased, High-Resolution VLSI Testing
This case uses FET plasmonic effects to detect circuit faults with THz radiation beyond conventional diffraction limits.
- Substrate Inspection Device Multi-Position Monitoring
A substrate inspection device uses multiple measurement parts to monitor regions from different positions for efficient state analysis.
- Contactless IC Quality Testing via Response Time and Power Feedback
A terminal measures integrated circuit response time to assess quality before personalization.
- Pulsed Laser SEL Testing with Detection and Reset Circuit
A detection and reset circuit breaks current paths upon latchup detection, preventing device damage during precise threshold energy determination.
- Semiconductor Inspection Device Dual Mode Electron Beam Optical
A semiconductor inspection device merges electron beam and optical systems to evaluate electrical characteristics and material properties.
- Substrate Inspection Device Monitoring Regions from Different Positions
A substrate inspection device monitors specific regions from different positions using a controlled measurement part movement path.
- Optical Path Deviation for Scanner Testing
A processor controls an optical element to deviate light toward an imaging sensor for operability assessment.
- RF Test System Data Verification via Calibration Comparison
A test system verifies measurement data through relative comparison against calibration standards.
- Neutron Soft Error Rate Calculation for Semiconductor LSI
A semiconductor LSI soft error rate calculator derives neutron flux data from low energy radiation tests using SEU cross section functions.
- Ultrasonic Semiconductor Inspection Apparatus
An ultrasonic transducer and stage move relative positions to generate measurement images from semiconductor devices.