Optical Probe Head Calibration for Micro-Component Testing
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Solution Overview
Problem
Existing optical probes for testing micro-optical components face challenges in achieving high precision, small pitch, and high port count, while also requiring robust probing at high working distances and varying wavelength ranges, with limited reproducibility and throughput.
Innovation Solution
An optical probe with a compact probe head, calibrated for precise alignment, capable of inserting into trenches of 250 μm or less, featuring micro-optical elements with sub-micron precision, and supporting high port counts, multiple functionalities, and operating across near ultraviolet to medium infrared wavelengths, ensuring reproducible optical coupling with variations of 0.5 dB or less.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If existing optical probes are used for testing micro-optical components, then basic optical coupling is achieved, but precision and reproducibility are limited with variations exceeding acceptable thresholds
Solution Approach 1:
The probe head is pre-calibrated by determining transmission values between optical components and storing them in a lookup table before actual testing. This preliminary calibration action enables the system to compensate for manufacturing tolerances and maintain high reproducibility (variations ≤0.5 dB) without requiring complex real-time adjustments during testing.
Solution Approach 2:
The system changes operational parameters by selecting different probe heads with specific characteristics (pitch, mode-field diameter, numerical aperture) matched to the requirements of different micro-optical components. This parameter matching approach optimizes coupling precision for each specific testing scenario while maintaining overall system reliability.
2Length of moving object
If probe head size is reduced to access small trenches (250 μm or less), then access to micro-optical components is enabled, but alignment precision becomes more difficult to maintain
Solution Approach 1:
Alignment markers are pre-defined in the trench and the probe head position is pre-calibrated relative to these markers. This preliminary positioning action allows the compact probe head to achieve sub-micron alignment precision (≤1 μm) by referencing predetermined marker positions rather than relying on complex real-time alignment mechanisms.
Solution Approach 2:
Alignment markers serve as intermediary reference elements between the compact probe head and the micro-optical components. These markers enable precise positioning of the small probe head by providing fixed reference points that bridge the gap between the reduced-size probe and the target components.
3Adaptability or versatility
If multiple functionalities are integrated into the optical probe (distance measurement, spectral analysis, etc.), then testing capabilities are enhanced, but device complexity increases
Solution Approach 1:
The optical probe is designed with universal multi-functionality by integrating multiple testing capabilities (optical coupling measurement, distance measurement via interferometry, spectral analysis) into a single probe head structure. This allows one probe design to perform diverse testing functions without requiring separate specialized probes for each measurement type.
Solution Approach 2:
The testing circuit acts as an intermediary that processes multiple types of optical signals (test signals, response signals, interferometric signals) generated by different functional elements in the probe head. This intermediary processing architecture enables multiple functionalities to be coordinated through a unified control and measurement system.
4Productivity
If high port count is implemented to increase throughput, then testing capacity is improved, but maintaining consistent coupling precision across all ports becomes more difficult
Solution Approach 1:
Transmission values for all optical components across multiple ports are pre-measured and stored in a lookup table during probe head calibration. This preliminary characterization of all ports enables the system to compensate for individual port variations and maintain consistent coupling precision (≤0.5 dB variation) across high port counts without requiring complex real-time optimization for each port.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient optical testing of micro-optical components with high precision, small pitch, and high throughput, supporting diverse functionalities like distance measurement and spectral analysis, while maintaining reproducible coupling efficiency.
Implementation Method 1
the micro-optical element is configured to optically couple light between the testing circuit and the micro-optical component
Data Source
AI summary
An optical coupling between optical components and, more particular, to an optical probe configured for optical testing of at least one micro-optical component, a method for producing an optical probe, and a method for optical testing of at least one micro-optical component. The optical probe includes a probe head, wherein an optical performance of the probe head is calibrated and wherein the probe head includes a testing circuit, wherein the testing circuit is fixed on a mechanical support; at least one micro-optical element, wherein the micro-optical element is a separate element with regard to the testing circuit and in mechanical contact with the testing circuit, wherein the micro-optical element is configured to optically couple light between the testing circuit and the micro-optical component, thereby being configured to determine an optical performance of the micro-optical component.