Extracting the lens support from the optical path eliminates surface imperfections that interfere with defect identification.
Linearizing the optical transfer function eliminates iterative minimization, reducing calculation time for real-time onboard systems.
Segmented diffraction element produces interference patterns from incoherent light for wafer-level optical phase detection.
Wavefront sensors detect fiducial mark positions to measure angular errors, resolving misalignment risks that degrade astigmatism correction outcomes.