Optical Probe Temperature Control Chamber for IC Testing
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Solution Overview
Problem
The miniaturization of semiconductor integrated circuits poses challenges for probe tools in discerning smaller circuit features, suppressing measurement errors from mechanical disturbances, and managing heat generated during optical measurements, which affects the proper functioning of ICs.
Innovation Solution
A multi-resolution microscopy system with high numerical aperture solid immersion lenses for optical measurements, isolated from mechanical disturbances, and a temperature control chamber with a vacuum seal for precise thermal management, allowing for accurate positioning and heat removal or simulation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If high N.A. solid immersion lens is used for high resolution measurement, then measurement precision is improved, but heat generation increases affecting IC functionality
Solution Approach 1:
The patent extracts the heat management function from the optical measurement system by introducing a separate temperature control chamber that surrounds the IC device. This chamber actively removes heat generated during high-resolution optical measurements using high N.A. solid immersion lenses, allowing the measurement system to operate at full resolution without thermal damage to the device under test.
2Reliability
If optical measurement is performed through back side of device, then non-intrusive measurement is achieved, but mechanical disturbances affect measurement accuracy
Solution Approach 1:
The patent applies preliminary anti-action by introducing vibration isolation mechanisms and stable mounting structures for the optical probe system before measurements are taken. The system pre-compensates for mechanical disturbances through rigid positioning stages and isolated mounting configurations, ensuring that back-side optical measurements remain accurate despite environmental vibrations and mechanical instabilities.
3Temperature
If coolant is injected onto IC for heat removal, then heat management is improved, but vibration from coolant flow interferes with optical focus
Solution Approach 1:
The patent introduces a temperature control chamber as an intermediary structure that surrounds the IC device. Instead of injecting coolant directly onto the device, the chamber acts as a mediator that facilitates heat removal through controlled thermal exchange, thereby eliminating the mechanical vibrations and optical interference caused by direct coolant injection while still achieving effective heat management.
4Temperature
If temperature control chamber is added for thermal management, then heat control is improved, but device complexity increases
Solution Approach 1:
The temperature control chamber is designed to perform multiple functions simultaneously: it provides thermal management for the IC device, serves as a mechanical support structure, and acts as a reference frame for optical positioning. This multi-functionality reduces the need for separate components and minimizes overall system complexity despite the addition of active temperature control capabilities.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-resolution optical measurements with reduced errors from mechanical vibrations and effective heat management, ensuring accurate IC testing and simulation of harsh conditions.
Implementation Method 1
The vacuum seal itself is compatible with multiple objectives provided they conform to the proper geometry. The seal includes a flexible portion and allows the optical probe to be accurately positioned to different locations on the target IC.
Implementation Method 2
an optical objective system configured to collect reflected or emitted light from the integrated circuit in the target device
Implementation Method 3
a temperature control chamber that can hold a fluid to control the temperature of the target device
Implementation Method 4
The disclosed system and method provide proper cooling to remove heat generated during the optical measurement.
Data Source
AI summary
An optical probe system for probing an electronic device includes a sample plate that can hold a target device comprising an integrated circuit, an optical objective system that can collect reflected or emitted light from the integrated circuit in the target device, and a temperature control chamber that can hold a fluid to control the temperature of the target device.