Multi-Resolution Optical Probe With Vacuum Seal Thermal Isolation
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Solution Overview
Problem
The miniaturization of semiconductor integrated circuits poses challenges for probe tools in discerning smaller circuit features, suppressing measurement errors from mechanical disturbances, and managing heat generated during optical measurements, which affects the proper function of ICs.
Innovation Solution
A multi-resolution microscopy system with high numerical aperture solid immersion lenses for optical measurements, isolated from mechanical disturbances, and a temperature control chamber with a vacuum seal for precise thermal management, allowing for accurate positioning and heat control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If high numerical aperture solid immersion lenses are used for high resolution measurement, then measurement precision is improved, but the system becomes more sensitive to mechanical disturbances and heat generation
Solution Approach 1:
The system divides the measurement environment into separate functional zones: a vibration-isolated optical measurement chamber and a temperature-controlled chamber. This segmentation allows high-resolution optical measurements to be isolated from mechanical disturbances while maintaining thermal control of the IC device, resolving the contradiction between measurement precision and sensitivity to harmful factors.
Solution Approach 2:
A vacuum seal acts as an intermediary barrier between the optical measurement chamber and the temperature control chamber. This vacuum seal mechanically isolates the optical components from vibrations while allowing thermal control fluid to effectively manage heat, thus protecting the optical measurement from mechanical disturbances without compromising thermal management.
2Temperature
If temperature control fluid is introduced to manage heat, then heat management is improved, but mechanical vibrations from coolant injection interfere with optical focus
Solution Approach 1:
The system separates the temperature control function from the optical measurement function by using a vacuum seal to divide the chambers. This allows temperature control fluid to be introduced for heat management while the vacuum barrier prevents mechanical vibrations from the coolant injection from reaching the optical components, maintaining optical focus stability.
Solution Approach 2:
The vacuum seal serves as an intermediary that transmits thermal control benefits while blocking mechanical vibrations. It allows the temperature control fluid to effectively manage heat generation during optical measurements while preventing vibrations from interfering with optical focus, thus resolving the contradiction between thermal control and measurement precision.
3Temperature
If vacuum seal is used for thermal control chamber, then thermal management is improved, but seal reliability under temperature and pressure variations is challenged
Solution Approach 1:
The vacuum seal design incorporates flexible portions that can deform to accommodate temperature and pressure variations. This parameter change capability allows the seal to maintain its vacuum barrier under varying thermal and pressure conditions, ensuring reliable thermal management while preventing leakage during operation.
Solution Approach 2:
The vacuum seal includes flexible portions that can deform to accommodate thermal expansion and pressure changes. This flexibility ensures that the seal maintains its integrity and vacuum barrier under varying operating conditions, thereby ensuring reliable thermal control without compromising seal reliability.
4Adaptability or versatility
If optical probe is positioned at different locations on IC, then measurement coverage is improved, but mechanical isolation from vibrations is compromised
Solution Approach 1:
The system segments the optical measurement path from the vibration sources by using a vacuum seal to isolate the optical chamber. This allows the optical probe to be positioned at different locations on the IC for comprehensive measurement coverage while the vacuum barrier maintains mechanical isolation from vibrations throughout the measurement area.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-resolution optical measurements with reduced errors and effective heat management, ensuring accurate IC testing and simulation of harsh operating conditions.
Implementation Method 1
The flexible bellows can mechanically isolate the optical objective system from vibrations in the temperature control chamber
Implementation Method 2
The temperature control chamber includes an outer chamber wall... wherein the temperature control chamber can be pressed towards the sample plate to form a seal to the fluid at the upper rim
Implementation Method 3
a temperature control chamber that can hold a fluid to control the temperature of the target device
Implementation Method 4
an optical objective system configured to collect reflected or emitted light from the integrated circuit
Implementation Method 5
an optical objective system configured to collect reflected or emitted light from the integrated circuit
Data Source
AI summary
An optical probe system for probing an electronic device includes a sample plate that can hold a target device comprising an integrated circuit, an optical objective system that can collect reflected or emitted light from the integrated circuit in the target device, and a temperature control chamber that can hold a fluid to control the temperature of the target device.