Optical Sensor Phononic Support Film for Higher Sensitivity
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Solution Overview
Problem
Existing optical sensors face challenges in improving sensitivity due to high thermal conductivity of the support film, which hinders effective conversion of thermal energy into electrical energy.
Innovation Solution
The optical sensor incorporates a support film with a phononic structure having a large number of holes and an insulating second layer, reducing thermal conductivity and enhancing the sensitivity by alternating strip-shaped first and second material layers made of SiGe with different conductivity types.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional support film is used, then the structural support is provided, but the thermal conductivity is high which reduces sensitivity
Solution Approach 1:
The support film is designed with a phononic structure containing a large number of holes, creating a porous configuration that reduces thermal conductivity. This allows the support film to maintain structural integrity while minimizing heat loss from the thermoelectric conversion material portion, thereby improving sensitivity by up to 4.7 times compared to conventional solid support films.
Solution Approach 2:
The support film comprises a composite structure with a phononic structure layer and an insulating layer. The phononic structure layer provides mechanical support with reduced thermal conductivity, while the insulating layer further enhances thermal isolation. This composite approach allows simultaneous achievement of structural support and thermal insulation, resolving the contradiction between support function and sensitivity.
2Reliability
If the phononic structure with holes is introduced, then thermal conductivity is reduced improving sensitivity, but the structural complexity increases
Solution Approach 1:
The support film is segmented into distinct functional layers: a phononic structure layer with holes for thermal management and an insulating layer for additional thermal isolation. This segmentation allows each layer to perform its specific function optimally while maintaining overall structural support, making the complex structure manageable and manufacturable.
3Reliability
If strip-shaped first and second material layers are alternately arranged, then thermoelectric conversion efficiency is improved, but the manufacturing complexity increases
Solution Approach 1:
The thermoelectric conversion material portion is segmented into multiple strip-shaped first material layers and second material layers arranged alternately. Each strip layer functions as an independent thermoelectric element, and their series connection multiplies the overall voltage output. This segmentation approach improves conversion efficiency while maintaining compatibility with standard semiconductor manufacturing processes.
Solution Approach 2:
The patent utilizes parameter changes in the thermoelectric conversion material portion by alternating between first material layers with a first conductivity type and second material layers with a second conductivity type. This alternating arrangement creates series-connected thermoelectric couples that enhance the Seebeck effect, improving overall conversion efficiency from thermal energy to electrical energy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The configuration significantly improves sensitivity by up to 4.7 times compared to sensors without the phononic structure, while maintaining high productivity and yield.
Implementation Method 1
The support film includes a first layer arranged on the heat sink side in a thickness direction and configured with a phononic structure having a large number of holes
Implementation Method 2
a thermoelectric conversion material portion arranged on one main surface of the support film and operative to convert thermal energy into electrical energy
Implementation Method 3
a light absorption film operative to convert light energy of received light into thermal energy
Data Source
AI summary
An optical sensor includes a support film, a thermoelectric conversion material portion, a heat sink, a light absorption film, a first electrode, and a second electrode. The thermoelectric conversion material portion includes a plurality of first material layers and a plurality of second material layers. The support film includes a first layer arranged on the heat sink side in a thickness direction and configured with a phononic structure having a large number of holes, and an insulating second layer arranged on the first layer and in contact with the thermoelectric conversion material portion.