Optical Wavelength Dispersion Device Using Waveguide Grating and Reflector
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Solution Overview
Problem
Conventional spectrometers face a trade-off between size and resolution, with high-resolution spectrometers being large and expensive due to complex optical systems, and existing micro-manufacturing methods like LIGA struggle to produce precise vertical gratings with sufficient yield.
Innovation Solution
An optical wavelength dispersion device comprising a waveguide unit with a first substrate, input unit, grating, and second substrate, along with a reflector, formed using high energy light sources like X-ray or EUV to reduce size and improve precision, featuring a grating with concave, convex, or planar profiles, and a manufacturing method involving photoresist layers and substrates for precise structure creation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional prism, grating or interference methods are used to achieve dispersion effect, then the spectrometer can realize wavelength separation, but the overall size and resolution ability need to be compromised
Solution Approach 1:
The patent transitions from conventional two-dimensional grating structures to three-dimensional photonic crystal structures with periodic variations in three dimensions. This dimensional enhancement enables higher resolution wavelength separation within a compact footprint by utilizing vertical stacking and lateral periodicity simultaneously, thereby improving resolution ability without proportionally increasing overall size.
Solution Approach 2:
The patent employs nested periodic structures where photonic crystals are embedded within waveguide layers, which are themselves integrated into substrate structures. This nested arrangement allows multiple functional elements to occupy overlapping spatial volumes, achieving high resolution dispersion capability while maintaining a compact overall device footprint.
2Volume of stationary object
If LIGA method is applied to reduce the size of spectrometer, then micro-structure can be manufactured, but the yield during molding process and degree of precision are insufficient for manufacturing vertical gratings
Solution Approach 1:
The patent replaces the mechanical LIGA molding process with a direct photolithography and etching approach. Instead of using complex electroplating and molding steps that struggle with vertical grating precision, the invention uses photoresist patterning followed by direct etching to form the photonic crystal structures, achieving superior manufacturing precision for vertical features while maintaining miniaturization benefits.
Solution Approach 2:
The patent changes the manufacturing parameters by using high-resolution photolithography with optimized photoresist thickness and exposure conditions. By adjusting the etching depth, photoresist layer thickness, and exposure energy, the process achieves precise control over vertical grating dimensions and photonic crystal feature sizes, overcoming the precision limitations of conventional LIGA molding.
3Manufacturing precision
If high energy light source is used to form input unit and grating, then the device achieves improved precision and compact size, but the manufacturing process becomes more complex
Solution Approach 1:
The patent combines multiple manufacturing steps into an integrated photolithography process. The input unit, grating structures, and photonic crystals are all formed in a single photoresist exposure and development sequence using high energy light sources. This merging of steps simplifies the overall manufacturing process while achieving high precision, as all critical features are defined by the same lithography mask and exposure parameters.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables a compact, high-resolution optical wavelength dispersion device with improved precision, suitable for both optical telecommunications and local communications, by using a waveguide unit and external reflector to disperse and redirect optical signals effectively.
Implementation Method 1
exposing a photoresist layer under a high energy light source
Implementation Method 2
a grating is formed on the first substrate for producing an output beam once the optical signal is dispersed
Implementation Method 3
the reflector is located outside of the waveguide unit, and is used for change emitting angle of the output beam
Data Source
AI summary
An optical wavelength dispersion device and manufacturing method therefor are disclosed, wherein the optical wavelength dispersion device includes a waveguide unit and a reflector, wherein the waveguide unit has a first substrate, an input unit, a grating and a second substrate. The input unit is formed on the first substrate and having a slit for receiving an optical signal, a grating is formed on the first substrate for producing an output beam once the optical signal is dispersed, the second substrate is located on the input unit and the grating, and forms a waveguide space with the first substrate, the reflector is located outside of the waveguide unit, and is used for change emitting angle of the output beam.