Organic Material Deposition Apparatus with Concurrent Substrate Transfer

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Solution Overview

Problem

Existing organic light emitting display device deposition processes face inefficiencies due to separate substrate transfer and alignment processes, leading to increased processing time and material waste, as the deposition process cannot be performed concurrently with these operations.

Innovation Solution

A deposition apparatus and method that allows for simultaneous transfer, alignment, and deposition processes within the same chamber, utilizing a chamber divided into substrate deposition areas and a standby area, with a transferring unit to move the deposition source between areas, enabling concurrent processing and optimizing chamber layout for efficient material use.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If separate substrate transfer and mask alignment processes are used, then process simplicity is maintained, but processing time increases and material waste occurs

Engineering Contradiction:

Improveprocessing speedVSAvoidchamber structure

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The chamber is divided into multiple substrate deposition areas (first substrate deposition area and second substrate deposition area) and a standby area, allowing different processes to occur simultaneously in different segments. The deposition source can be transferred between areas using transferring units, enabling concurrent operations without requiring a single complex process sequence.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent introduces spatial dimensionality by arranging multiple substrate deposition areas and a standby area in different locations within the chamber. The deposition source can move between these areas using transferring units, adding a spatial dimension to the process flow that enables parallel operations and reduces sequential processing time.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Loss of substance

If deposition source is transferred between substrate areas, then material efficiency improves, but device complexity increases

Engineering Contradiction:

Improveorganic material lossVSAvoidtransferred unit system

Core Design Contradiction:

Loss of substanceVSDevice complexity

Solution Approach 1:

The deposition source is transferred to the standby area before substrate deposition begins, and alignment processes are completed while the source is positioned or being transferred. This preliminary positioning and concurrent alignment reduces the time the deposition source is active, minimizing organic material loss while the transferring units handle the movement.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The deposition source remains in a ready state or is being transferred continuously while substrates undergo alignment and deposition processes in different areas. This continuous positioning and transfer mechanism ensures the deposition source is always ready to deposit material when needed, maximizing material efficiency by avoiding idle time and unnecessary material deposition during transfers.

Inventive Principle:

Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces processing time and material waste, maximizing material efficiency by allowing deposition to occur during substrate transfer and alignment, while optimizing chamber design for improved space utilization and throughput.

Implementation Method 1

spray particles of an organic material onto respective ones of first and second substrates

Methodology Applied

Scientific EffectVaporization: Evaporation

Implementation Method 2

spray particles of an organic material onto respective ones of first and second substrates

Methodology Applied

Scientific EffectCondensation: Condensation

Data Source

PatentUS8974858B2Method of depositing organic material

Publication Date: 2015.03.10 SAMSUNG DISPLAY CO LTD

AI summary

An apparatus for depositing an organic material and a depositing method thereof, wherein a deposition process is performed with respect to a second substrate while transfer and alignment processes are performed with respect to a first substrate in a chamber, so that loss of an organic material wasted in the transfer and alignment processes can be reduced, thereby maximizing material efficiency and minimizing a processing tack time. The apparatus includes a chamber having an interior divided into a first substrate deposition area and a second substrate deposition area, an organic material deposition source transferred to within ones of the first and second substrate deposition areas to spray particles of an organic material onto respective ones of first and second substrates and a first transferring unit to rotate the organic material deposition source in a first direction from one of the first and second substrate deposition areas to an other of the first and second substrate deposition areas.